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Wafer-Scale Periodic Nanohole Arrays Templated from Two-Dimensional Nonclose-Packed Colloidal Crystals
Abstract
This communication reports a simple yet versatile nonlithographic approach for fabricating wafer-scale periodic nanohole arrays from a large variety of functional materials, including metals, semiconductors, and dielectrics. Spin-coated two-dimensional (2D) nonclose-packed colloidal crystals are used as first-generation shadow masks during physical vapor deposition to produce isolated nanohole arrays. These regular nanoholes can then be used as second-generation etching masks to create submicrometer void arrays in the substrates underneath. Complex patterns with micrometer-scale resolution can be made by standard microfabrication techniques for potential device applications. These 2D-ordered nanohole arrays may find important technological applications ranging from subwavelength optics to interferometric biosensors.
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Citations
Cited by
Zhang, J., Li, Y., Zhang, X., & Yang, B. (2010) · Advanced Materials · doi:10.1002/adma.201000755 · Cited by 649
Cai, Z., Li, Z., Ravaine, S., He, M., Song, Y., Yin, Y., Zheng, H., Teng, J., & Zhang, A. (2021) · Chemical Society Reviews · doi:10.1039/d0cs00706d · Cited by 542
Fabrication of nanopillars by nanosphere lithography
Cheung, C. L., Nikolić, R. J., Reinhardt, C. E., & Wang, T. F. (2006) · Nanotechnology · doi:10.1088/0957-4484/17/5/028 · Cited by 309
Two-Dimensional Photonic Crystal Chemical and Biomolecular Sensors
Cai, Z., Smith, N. L., Zhang, J.-T., & Asher, S. A. (2015) · Analytical Chemistry · doi:10.1021/ac504679n · Cited by 216
Metadata
- Authors
- Jiang, P., & McFarland, M. J.
- Venue
- Journal of the American Chemical Society
- Publisher
- American Chemical Society (ACS)
- Published
- 2005-02-26
- Volume
- 127
- Issue
- 11
- Pages
- 3710-3711
- ISSN
- 0002-7863 (ISSN-L)
- 1520-5126
- OpenAlex
- W1990950301
- Cited by
- 187
- References
- 0
- FWCI
- 10.12
- Type
- journal article
- Language
- en
- Open access
- closed
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- Jiang, P., & McFarland, M. J. (2005). Wafer-Scale Periodic Nanohole Arrays Templated from Two-Dimensional Nonclose-Packed Colloidal Crystals. Journal of the American Chemical Society. https://doi.org/10.1021/ja042789%2B
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