The DOI matches its Crossref record; 9 of the 9 references it cites were found in a registry or an index.
Fabrication of nanopillars by nanosphere lithography
Open accessAbstract
A low cost nanosphere lithography method for patterning and generation of semiconductor nanostructures provides a potential alternative to the conventional top-down fabrication techniques. Forests of silicon pillars of sub-500 nm diameter and with an aspect ratio up to 10 were fabricated using a combination of the nanosphere lithography and deep reactive ion etching techniques. The nanosphere etch mask coated silicon substrates were etched using oxygen plasma and a time-multiplexed 'Bosch' process to produce nanopillars of different length, diameter and separation. Scanning electron microscopy data indicate that the silicon etch rates with the nanoscale etch masks decrease linearly with increasing aspect ratio of the resulting etch structures.
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Cites
Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces
Hulteen, J. C., & Van Duyne, R. P. (1995) · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · doi:10.1116/1.579726 · Cited by 1,465
Superhydrophobicity and Superhydrophilicity of Regular Nanopatterns
Martines, E., Seunarine, K., Morgan, H., Gadegaard, N., Wilkinson, C. D. W., & Riehle, M. O. (2005) · Nano Letters · doi:10.1021/nl051435t · Cited by 524
Magnetic multilayers on nanospheres
Albrecht, M., Hu, G., Guhr, I. L., Ulbrich, T. C., Boneberg, J., Leiderer, P., & Schatz, G. (2005) · Nature Materials · doi:10.1038/nmat1324 · Cited by 355
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Fabrication of Size-Tunable Large-Area Periodic Silicon Nanopillar Arrays with Sub-10-nm Resolution
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Cited by
Zhang, J., Li, Y., Zhang, X., & Yang, B. (2010) · Advanced Materials · doi:10.1002/adma.201000755 · Cited by 649
Joshi, R. K., & Schneider, J. J. (2012) · Chemical Society Reviews · doi:10.1039/c2cs35089k · Cited by 270
Wolfsteller, A., Geyer, N., Nguyen-Duc, T.-K., Das Kanungo, P., Zakharov, N. D., Reiche, M., Erfurth, W., Blumtritt, H., Kalem, S., Werner, P., et al. (2010) · Thin Solid Films · doi:10.1016/j.tsf.2009.08.021 · Cited by 54
Metadata
- Authors
- Cheung, C. L., Nikolić, R. J., Reinhardt, C. E., & Wang, T. F.
- Venue
- Nanotechnology
- Publisher
- IOP Publishing
- Published
- 2006-02-10
- Volume
- 17
- Issue
- 5
- Pages
- 1339-1343
- ISSN
- 0957-4484 (ISSN-L)
- 1361-6528
- OpenAlex
- W2094409448
- Cited by
- 309
- References
- 9
- FWCI
- 10.97
- Type
- journal article
- Language
- en
- Open access
- bronze
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
