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Improved Pattern Transfer in Soft Lithography Using Composite Stamps
Abstract
Composite stamps composed of two layers a stiff layer supported by a flexible layer extend the capabilities of soft lithography to the generation of 50−100-nm features. The preparation of these stamps was adapted from a procedure originally developed by Schmid et al. ( Macromolecules 2000, 33, 3042) for microcontact printing. This paper demonstrates how pattern transfer using other soft lithographic techniques micromolding in capillaries, microtransfer molding, and phase-shifting lithography can be improved using two-layer stamps relative to stamps made of Sylgard 184 poly(dimethylsiloxane).
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Kuznetsov, A. I., Brongersma, M. L., Yao, J., Chen, M. K., Levy, U., Tsai, D. P., Zheludev, N. I., Faraon, A., Arbabi, A., Yu, N., et al. (2024) · ACS Photonics · doi:10.1021/acsphotonics.3c00457 · Cited by 420
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Rolland, J. P., Hagberg, E. C., Denison, G. M., Carter, K. R., & De Simone, J. M. (2004) · Angewandte Chemie International Edition · doi:10.1002/anie.200461122 · Cited by 292
Chen, H.-L., Cattoni, A., De Lépinau, R., Walker, A. W., Höhn, O., Lackner, D., Siefer, G., Faustini, M., Vandamme, N., Goffard, J., et al. (2019) · Nature Energy · doi:10.1038/s41560-019-0434-y · Cited by 200
Metadata
- Authors
- Odom, T. W., Love, J. C., Wolfe, D. B., Paul, K. E., & Whitesides, G. M.
- Venue
- Langmuir
- Publisher
- American Chemical Society (ACS)
- Published
- 2002-05-16
- Volume
- 18
- Issue
- 13
- Pages
- 5314-5320
- ISSN
- 0743-7463 (ISSN-L)
- 1520-5827
- OpenAlex
- W2020416116
- Cited by
- 709
- References
- 0
- FWCI
- 24.15
- Type
- journal article
- Language
- en
- Open access
- closed
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- Odom, T. W., Love, J. C., Wolfe, D. B., Paul, K. E., & Whitesides, G. M. (2002). Improved Pattern Transfer in Soft Lithography Using Composite Stamps. Langmuir. https://doi.org/10.1021/la020169l
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
