High‐Resolution Soft Lithography: Enabling Materials for Nanotechnologies
Abstract
Making a good impression: Photocurable, liquid perfluoropolyethers (PFPEs) are ideal materials for high-resolution (<100 nm) pattern transfer and imprint lithographic processes (see pictures). PFPEs possess attributes of both elastomers and rigid materials, exhibit a remarkably low surface energy, mold extremely small features with high fidelity, resist swelling by organic solvents, and endure repetitive molding procedures.
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Recent advances in synthetic techniques using high-precision fabrication show promise for the production of more precisely defined microparticles and nanoparticles.
“Recent advances in synthetic techniques using high-precision fabrication, such as particle replication in non-wetting templates and microfluidic-based reaction chemistry, show promise for the production of more precisely defined microparticles and nanoparticles51,52.”
From How to design preclinical studies in nanomedicine and cell therapy to maximize the prospects of clinical translation (2018) · cites this paper as [51]
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- Authors
- Rolland, J. P., Hagberg, E. C., Denison, G. M., Carter, K. R., & De Simone, J. M.
- Affiliations
- University of North Carolina at Chapel Hill (US)
- IBM Research - Almaden (US)
- Corresponding author
- Carter, Kenneth R.
- Venue
- Angewandte Chemie International Edition
- Publisher
- Wiley
- Published
- 2004-11-02
- Volume
- 43
- Issue
- 43
- Pages
- 5796-5799
- ISSN
- 1433-7851 (ISSN-L)
- 1521-3773
- OpenAlex
- W2144020819
- Cited by
- 292
- References
- 26
- Citations by year
- 2026: 1 · 2025: 10 · 2024: 3 · 2023: 8 · 2022: 5 · 2021: 16 · 2020: 4 · 2019: 10 · 2018: 14 · 2017: 12 · 2016: 15 · 2015: 9 · 2014: 9 · 2013: 18 · 2012: 17
- FWCI
- 7.76
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Angewandte Chemie International Edition (publishedVersion)
- PubMed (publishedVersion)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Nanofabrication and Lithography Techniques
- Physical Sciences › Engineering › Mechanical Engineering › Advanced Materials and Mechanics
- Physical Sciences › Materials Science › Materials Chemistry › Block Copolymer Self-Assembly
- Keywords
- soft lithography, perfluoropolyether, imprint lithography, pattern transfer, low surface energy, solvent resistance, nanofabrication
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