The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Polymer Imprint Lithography with Molecular-Scale Resolution
Abstract
We show that small diameter, single-walled carbon nanotubes can serve as templates for performing polymer imprint lithography with feature sizes as small as 2 nm − comparable to the size of an individual molecule. The angstrom level uniformity in the critical dimensions of the features provided by this unusual type of template provides a unique ability to investigate systematically the resolution of imprint lithography at this molecular scale. Collective results of experiments with several polymer formulations for the molds and the molded materials suggest that the density of cross-links is an important molecular parameter that influences the ultimate resolution in this process. Optimized materials enable reliable, repetitive patterning in this single nanometer range.
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Cites
Fetters, L. J., Lohse, D. J., Richter, D., Witten, T. A., & Zirkel, A. (1994) · Macromolecules · doi:10.1021/ma00095a001 · Cited by 1,999
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Schvartzman, M., Palma, M., Sable, J., Abramson, J., Hu, X., Sheetz, M. P., & Wind, S. J. (2011) · Nano Letters · doi:10.1021/nl104378f · Cited by 263
Wen, Y., Liu, Y., Guo, Y., Yu, G., & Hu, W. (2011) · Chemical Reviews · doi:10.1021/cr1001904 · Cited by 258
Oligosaccharide/silicon-containing block copolymers with 5 nm features for lithographic applications
Cushen, J. D., Otsuka, I., Bates, C. M., Halila, S., Fort, S., Rochas, C., Easley, J. A., Rausch, E. L., Thio, A., Borsali, R., et al. (2012) · ACS Nano · doi:10.1021/nn300459r · Cited by 211
An Intrinsically Stretchable Nanowire Photodetector with a Fully Embedded Structure
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Metadata
- Authors
- Hua, F., Sun, Y., Gaur, A., Meitl, M. A., Bilhaut, L., Rotkina, L., Wang, J., Geil, P., Shim, M., Rogers, J. A., & Shim, A.
- Venue
- Nano Letters
- Publisher
- American Chemical Society (ACS)
- Published
- 2004-11-13
- Volume
- 4
- Issue
- 12
- Pages
- 2467-2471
- ISSN
- 1530-6984 (ISSN-L)
- 1530-6992
- OpenAlex
- W2030706404
- Cited by
- 413
- References
- 1
- FWCI
- 14.64
- Type
- journal article
- Language
- en
- Open access
- closed
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- Hua, F., Sun, Y., Gaur, A., Meitl, M. A., Bilhaut, L., Rotkina, L., Wang, J., Geil, P., Shim, M., Rogers, J. A., & Shim, A. (2004). Polymer Imprint Lithography with Molecular-Scale Resolution. Nano Letters. https://doi.org/10.1021/nl048355u
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