The DOI matches its Crossref record.
Thin Film Piezoelectrics for MEMS
Open accessOverview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
Neural Dust: An Ultrasonic, Low Power Solution for Chronic Brain-Machine Interfaces
Seo, D., Carmena, J. M., Rabaey, J. M., Alon, E., & Maharbiz, M. M. (2013) · arXiv · doi:10.48550/arxiv.1307.2196 · Cited by 172
Model validation of untethered, ultrasonic neural dust motes for cortical recording
Seo, D., Carmena, J. M., Rabaey, J. M., Maharbiz, M. M., & Alon, E. (2015) · Journal of Neuroscience Methods · doi:10.1016/j.jneumeth.2014.07.025 · Cited by 158
Birjis, Y., Swaminathan, S., Nazemi, H., Raj, G. C. A., Munirathinam, P., Abu-Libdeh, A., & Emadi, A. (2022) · Sensors · doi:10.3390/s22239151 · Cited by 84
Metadata
- Authors
- Trolier-McKinstry, S., & Muralt, P.
- Venue
- Journal of Electroceramics
- Published
- 2004-01
- Volume
- 12
- Issue
- 1-2
- Pages
- 7-17
- ISSN
- 1385-3449 (ISSN-L)
- 1573-8663
- OpenAlex
- W2018409502
- Cited by
- 1,023
- References
- 0
- FWCI
- 14.79
- Type
- journal article
- Language
- en
- Open access
- green
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Thin Film Piezoelectrics for MEMS. https://app.cochat.ai/papers/10.1023/b:jecr.0000033998.72845.51
- The paper
- Trolier-McKinstry, S., & Muralt, P. (2004). Thin Film Piezoelectrics for MEMS. Journal of Electroceramics. https://doi.org/10.1023/b%3Ajecr.0000033998.72845.51
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.