Soft X-ray imaging with a normal incidence mirror
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Cites
UNDERWOOD, J. H., & Barbee, T. W. (1981) · Applied Optics · doi:10.1364/ao.20.003027 · Cited by 373 · see citing works
Self-citationControlled fabrication of multilayer soft-x-ray mirrors
Spiller, E. A., Segmüller, A., Rife, J. C., et al. (1980) · Applied Physics Letters · doi:10.1063/1.91759 · Cited by 113 · see citing works
UNDERWOOD, J. H. (2003) · digital Encyclopedia of Applied Physics · doi:10.1002/3527600434.eap574 · Cited by 8 · see citing works
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Molybdenum-silicon multilayer mirrors for the extreme ultraviolet
Barbee, T. W., Mrowka, S., & Hettrick, M. C. (1985) · Applied Optics · doi:10.1364/ao.24.000883 · Cited by 220 · see citing works
Self-citationExtreme ultraviolet lithography
Kazazis, D., Santaclara, J. G., van Schoot, J., Mochi, I., & Ekinci, Y. (2024) · Nature Reviews Methods Primers · doi:10.1038/s43586-024-00361-z · Cited by 149 · see citing works
- Authors
- Underwood, J. H., & Barbee, T. W.
- Affiliations
- Jet Propulsion Laboratory (US)
- Stanford University (US)
- ORCID
- Underwood, James H.
- Venue
- Nature
- Published
- 1981-12
- Volume
- 294
- Issue
- 5840
- Pages
- 429-431
- ISSN
- 0028-0836 (ISSN-L)
- 1476-4687
- OpenAlex
- W2021742853
- Cited by
- 85
- References
- 3
- Citations by year
- 2025: 1 · 2024: 1 · 2019: 18 · 2017: 2 · 2016: 3 · 2015: 1 · 2013: 4
- FWCI
- 3.14
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- www.springer.com/tdm (tdm)
- Locations
- Nature (publishedVersion)
- Topics
- Physical Sciences › Physics and Astronomy › Radiation › Advanced X-ray Imaging Techniques
- Physical Sciences › Physics and Astronomy › Radiation › X-ray Spectroscopy and Fluorescence Analysis
- Physical Sciences › Materials Science › Materials Chemistry › X-ray Diffraction in Crystallography
- Keywords
- soft X-ray imaging, tungsten/carbon multilayers, concave mirror, X-ray diffraction, X-ray reflectivity, silicon substrate
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
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