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Nano-opto-electro-mechanical systems
Open accessAbstract
A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electro-mechanical systems (NOEMS) offer unprecedented opportunities to control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances from the field of optomechanics, they also bear the potential for highly efficient, low-noise transducers between microwave and optical signals, in both the classical and the quantum domains. This Perspective discusses the fundamental physical limits of NOEMS, reviews the recent progress in their implementation and suggests potential avenues for further developments in this field.
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“Challenges such as hermetic sealing with optical and electrical feedthroughs are solvable88,89.”
From Roadmapping the next generation of silicon photonics (2024) · cites this paper as [88]
Citations
Cites
Kimble, H. J. (2008) · Nature · doi:10.1038/nature07127 · Cited by 6,023
Aspelmeyer, M., Kippenberg, T. J., & Marquardt, F. (2014) · Reviews of Modern Physics · doi:10.1103/revmodphys.86.1391 · Cited by 5,501
Eichenfield, M., Chan, J., Camacho, R. M., Vahala, K. J., & Painter, O. J. (2009) · Nature · doi:10.1038/nature08524 · Cited by 1,087
Carrier-induced change in refractive index of InP, GaAs and InGaAsP
Bennett, B. R., Soref, R. A., & del Alamo, J. A. (1990) · IEEE Journal of Quantum Electronics · doi:10.1109/3.44924 · Cited by 1,032
Aspuru-Guzik, A., & Walther, P. (2012) · Nature Physics · doi:10.1038/nphys2253 · Cited by 952
Quantum technologies with hybrid systems
Kurizki, G., Bertet, P., Kubo, Y., Mølmer, K., Petrosyan, D., Rabl, P., & Schmiedmayer, J. (2015) · Proceedings of the National Academy of Sciences · doi:10.1073/pnas.1419326112 · Cited by 847
Bidirectional and efficient conversion between microwave and optical light
Andrews, R. W., Peterson, R. W., Purdy, T., Cicak, K., Simmonds, R. W., Regal, C. A., & Lehnert, K. W. (2014) · Nature Physics · doi:10.1038/nphys2911 · Cited by 841
Nanomechanical coupling between microwave and optical photons
Bochmann, J., Vainsencher, A., Awschalom, D. D., & Cleland, A. N. (2013) · Nature Physics · doi:10.1038/nphys2748 · Cited by 600
Electrostatic pull-in instability in MEMS/NEMS: A review
Zhang, W., Yan, H., Peng, Z., & Meng, G. (2014) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2014.04.025 · Cited by 571
Fang, K., Luo, J., Metelmann, A., Matheny, M. H., Marquardt, F., Clerk, A. A., & Painter, O. J. (2017) · Nature Physics · doi:10.1038/nphys4009 · Cited by 520
Research works printed but not linked: 12
- Safavi-Naeini, A. H. & Painter, O. Proposal for an optomechanical traveling wave phonon–photon translator. New J. Phys. 13, 013017 (2011).
- Wang, Y.-D. & Clerk, A. A. Using interference for high fidelity quantum state transfer in optomechanics. Phys. Rev. Lett. 108, 153603 (2012).
- Tsang, M. Cavity quantum electro-optics. Phys. Rev. A 81, 063837 (2010).
- Zhang, X., Zhu, N., Zou, C.-L. & Tang, H. X. Optomagnonic whispering gallery microresonators. Phys. Rev. Lett. 117, 123605 (2016).
- Han, S., Seok, T. J., Quack, N., Yoo, B.-W. & Wu, M. C. Large-scale silicon photonic switches with movable directional couplers. Optica 2, 370 (2015).
- Zeuthen, E., Schliesser, A., Sørensen, A. S. & Taylor, J. M. Figures of merit for quantum transducers. Preprint at https://arxiv.org/abs/1610.01099 (2016). · arXiv
- Zou, C.-L., Han, X., Jiang, L. & Tang, H. X. Cavity piezomechanical strong coupling and frequency conversion on an aluminum nitride chip. Phys. Rev. A 94, 013812 (2016).
- Xiong, C., Fan, L., Sun, X. & Tang, H. X. Cavity piezooptomechanics: piezoelectrically excited, optically transduced optomechanical resonators. Appl. Phys. Lett. 102, 021110 (2013).
- Fong, K. Y., Fan, L., Jiang, L., Han, X. & Tang, H. X. Microwave-assisted coherent and nonlinear control in cavity piezo-optomechanical systems. Phys. Rev. A 90, 051801 (2014).
- Fang, K., Yu, Z. & Fan, S. Photonic Aharonov–Bohm effect based on dynamic modulation. Phys. Rev. Lett. 108, 153901 (2012).
- Xu, X.-W., Li, Y., Chen, A.-X. & Liu, Y. Nonreciprocal conversion between microwave and optical photons in electro-optomechanical systems. Phys. Rev. A 93, 023827 (2016).
- Li, J., Lee, H. & Vahala, K. J. Microwave synthesizer using an on-chip Brillouin oscillator. Nat. Commun. 4, 2097 (2013).
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Cutler, T. F. (2020) · Durham Research Online (Durham University) · doi:10.15128/r1g732d901w
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Metadata
- Authors
- Midolo, L., Schliesser, A., & Fiore, A.
- Affiliations
- University of Copenhagen (DK)
- Eindhoven University of Technology (NL)
- Corresponding author
- Midolo, Leonardo
- Venue
- Nature Nanotechnology
- Published
- 2018-01
- Volume
- 13
- Issue
- 1
- Pages
- 11-18
- ISSN
- 1748-3387 (ISSN-L)
- 1748-3395
- OpenAlex
- W2782313361
- Cited by
- 276
- References
- 82
- Citations by year
- 2026: 25 · 2025: 23 · 2024: 26 · 2023: 34 · 2022: 38 · 2021: 36 · 2020: 41 · 2019: 42 · 2018: 11
- FWCI
- 2.64
- Type
- journal article
- Language
- en
- Update notices
- correction (2018-02-05)
- Open access
- green
- research.tue.nl
- Licence
- Locations
- Nature Nanotechnology (publishedVersion)
- PubMed (publishedVersion)
- TU/e Research Portal (acceptedVersion, other-oa)
- arXiv (Cornell University) (submittedVersion)
- TU/e Research Portal (submittedVersion)
- Figshare (submittedVersion, cc-by)
- Research at the University of Copenhagen (University of Copenhagen) (submittedVersion)
- TU/e Research Portal (submittedVersion, other-oa)
- arXiv (Cornell University)
- Funders
- European Commission (732894, 638765)
- Nederlandse Organisatie voor Wetenschappelijk Onderzoek
- Danmarks Frie Forskningsfond (4002-00060, 4184-00203)
- Stichting voor de Technische Wetenschappen (10380, 12662)
- Topics
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Mechanical and Optical Resonators
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Orbital Angular Momentum in Optics
- Keywords
- optomechanics, photonic nanostructures, lighting control, quantum transduction, nanodevices, physical limits, optical communication, sensing
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