The DOI matches its Crossref record; 31 of the 31 references it cites were found in a registry or an index.
Three-dimensional femtosecond laser nanolithography of crystals
Open accessAbstract
So far, nanostructuring of hard optical crystals has been exclusively limited to their surface, as stress-induced crack formation and propagation render high-precision volume processes ineffective1,2. Here, we show that the rate of nanopore chemical etching in the popular laser crystals yttrium aluminium garnet and sapphire can be enhanced by more than five orders of magnitude (from <0.6 nm h−1 to ~100 µm h−1) by the use of direct laser writing, before etching. The process makes it possible to produce arbitrary three-dimensional nanostructures with 100 nm feature sizes inside centimetre-scale laser crystals without brittle fracture. To showcase the potential of the technique we fabricate subwavelength diffraction gratings and nanostructured optical waveguides in yttrium aluminium garnet and millimetre-long nanopores in sapphire. The approach offers a pathway for transferring concepts from nanophotonics to the fields of solid-state lasers and crystal optics.Direct laser writing is shown to dramatically enhance the chemical etch rate of laser crystals yttrium aluminium garnet and sapphire, allowing nanostructuring.
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Cited by
Efficient ultrafast laser writing with elliptical polarization
Lei, Y., Shayeganrad, G., Wang, H., Sakakura, M., Yu, Y., Wang, L., Kliukin, D., Skuja, L., Svirko, Y., & Kazansky, P. G. (2023) · Light: Science & Applications · doi:10.1038/s41377-023-01098-2 · Cited by 48
Ultrafast Laser Writing in Different Types of Silica Glass
Lei, Y., Wang, H., Skuja, L., Kühn, B., Franz, B., Svirko, Y., & Kazansky, P. G. (2023) · Laser & Photonics Reviews · doi:10.1002/lpor.202200978 · Cited by 31
Metadata
- Authors
- Ródenas, A., Gu, M., Corrielli, G., Paiè, P., John, S., Kar, A. K., & Osellame, R.
- Venue
- Nature Photonics
- Published
- 2018-12-31
- Volume
- 13
- Issue
- 2
- Pages
- 105-109
- ISSN
- 1749-4885 (ISSN-L)
- 1749-4893
- OpenAlex
- W2904794646
- Cited by
- 253
- References
- 31
- FWCI
- 15.47
- Type
- journal article
- Language
- en
- Open access
- green
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- Ródenas, A., Gu, M., Corrielli, G., Paiè, P., John, S., Kar, A. K., & Osellame, R. (2019). Three-dimensional femtosecond laser nanolithography of crystals. Nature Photonics. https://doi.org/10.1038/s41566-018-0327-9
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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