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Cited by 147Metamaterials and Metasurfaces ApplicationsPhotonic Crystals and ApplicationsPlasmonic and Surface Plasmon Research

Structural Color Filters Enabled by a Dielectric Metasurface Incorporating Hydrogenated Amorphous Silicon Nanodisks

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Park, Chul-Soon, Shrestha, Vivek Raj, Yue, Wenjing, Gao, Song, Lee, Sang-Shin, Kim, Eun-Soo, Choi, Duk-Yong·2017·Scientific Reports
DOI 10.1038/s41598-017-02911-wPMC PMC5451390
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Abstract

It is advantageous to construct a dielectric metasurface in silicon due to its compatibility with cost-effective, mature processes for complementary metal-oxide-semiconductor devices. However, high-quality crystalline-silicon films are difficult to grow on foreign substrates. In this work, we propose and realize highly efficient structural color filters based on a dielectric metasurface exploiting hydrogenated amorphous silicon (a-Si:H), known to be lossy in the visible regime. The metasurface is comprised of an array of a-Si:H nanodisks embedded in a polymer, providing a homogeneously planarized surface that is crucial for practical applications. The a-Si:H nanodisk element is deemed to individually support an electric dipole (ED) and magnetic dipole (MD) resonance via Mie scattering, thereby leading to wavelength-dependent filtering characteristics. The ED and MD can be precisely identified by observing the resonant field profiles with the assistance of finite-difference time-domain simulations. The completed color filters provide a high transmission of around 90% in the off-resonance band longer than their resonant wavelengths, exhibiting vivid subtractive colors. A wide range of colors can be facilitated by tuning the resonance by adjusting the structural parameters like the period and diameter of the a-Si:H nanodisk. The proposed devices will be actively utilized to implement color displays, imaging devices, and photorealistic color printing.

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  • Good transmission efficiencies have been reported in [20-24], but the colors were subtractive in nature.

    “Although, good transmission efficiencies have been reported in [20–24], the colors were subtractive in nature (CMYK colors are more appropriate for reflected light applications).”

    From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [23]

  • After optimization, a significantly enhanced gamut was observed for both single and double layered index-matched configurations in comparison to a single layered shape without the capping.

    “After the optimization was run, a significantly enhanced gamut was observed (as plotted in Fig. 6 (d)) for both single and double layered configurations in comparison to a single layered shape without the capping.”

    From Robust inverse design of all-dielectric metasurface transmission-mode color filters (2020) · cites this paper as [23]

    The Results section on tailoring color output reports a broad palette from varying nanodisk dimensions, but does not compare capped single- and double-layer configurations with an uncapped single layer. Searches for capping, index matching, and the claimed gamut comparison found no passage addressing that comparison. In this source, Fig. 6(d) concerns a nanodisk field profile, not a gamut plot; page numbers were unavailable in our copy. (LLM, conf=0.76)

    Experimental — accuracy not yet measured

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Research works printed but not linked: 42

  1. [1]Kildishev AV Boltasseva A Shalaev VM Planar photonics with metasurfaces Science 2013 339 1232009 10.1126/science.1232009 23493714 · DOI · Paper page
  2. [3]Ding F Wang Z He S Shalaev VM Kildishev AV Broadband high-efficiency half-wave plate: A supercell-based plasmonic metasurface approach ACS Nano 2015 9 4111 4119 10.1021/acsnano.5b00218 25790895 · DOI · Paper page
  3. [4]Arbabi A Horie Y Bagheri M Faraon A Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission Nat. Nanotechnol. 2015 10 937 944 10.1038/nnano.2015.186 26322944 · DOI
  4. [5]West PR Searching for better plasmonic materials Laser Photonics Rev 2010 4 795 808 10.1002/lpor.200900055 · DOI
  5. [6]Boltasseva A Atwater HA Low-loss plasmonic metamaterials Science 2011 331 290 291 10.1126/science.1198258 21252335 · DOI
  6. [7]Yu YF High-transmission dielectric metasurface with 2π phase control at visible wavelengths Laser Photonics Rev. 2015 9 412 418 10.1002/lpor.201500041 · DOI
  7. [8]Staude I Tailoring directional scattering through magnetic and electric resonances in subwavelength silicon nanodisks ACS Nano 2013 7 7824 7832 10.1021/nn402736f 23952969 · DOI
  8. [9]Kuznetsov AI Microshnichenko AE Fu YH Zhang JB Luk’yanchuk B Magnetic light Sci. Rep. 2012 2 492 10.1038/srep00492 22768382 PMC3389365 · DOI
  9. [10]van de Groep J Polman A Designing dielectric resonators on substrates: Combining magnetic and electric resonances Opt. Express 2013 21 26285 26302 10.1364/OE.21.026285 24216852 · DOI
  10. [11]Yi Y Strong visible magnetic resonance of size-controlled silicon-nanoblock metasurfaces Appl. Phys. Express 2016 9 042001 10.7567/APEX.9.042001 · DOI
  11. [12]Xu T Structural colors: From plasmonic to carbon nanostructures Small 2011 7 3128 3136 10.1002/smll.201101068 21932283 · DOI
  12. [13]Kinoshita S Yoshioka S Structural colors in nature: The role of regularity and irregularity in the structure ChemPhysChem 2005 6 1442 1459 10.1002/cphc.200500007 16015669 · DOI
  13. [14]Park HJ Xu T Lee JY Ledbetter A Guo LJ Photonic color filters integrated with organic solar cells for energy harvesting ACS Nano 2011 5 7055 7060 10.1021/nn201767e 21800897 · DOI
  14. [15]Cheng F Ga J Luk TS Yang X Structural color printing based on plasmonic metasurfaces of perfect light absorption Sci. Rep 2015 5 11045 10.1038/srep11045 26047486 PMC4457024 · DOI
  15. [16]Xu T Wu YK Luo X Guo LJ Plasmonic nanoresonators for high-resolution colour filtering and spectral imaging Nat. Commun. 2010 1 59 20975716
  16. [17]Ellenbogen T Seo K Crozier KB Chromatic plasmonic polarizers for active visible color filtering and polarimetry Nano Lett. 2012 12 1026 1031 10.1021/nl204257g 22229785 · DOI
  17. [18]Li Z Clark AW Cooper JM Dual color plasmonic pixels create a polarization controlled nano color palette ACS Nano 2016 10 492 498 10.1021/acsnano.5b05411 26631346 · DOI
  18. [19]Do YS Plasmonic color filter and its fabrication for large-area applications Adv. Opt. Mater. 2013 1 133 138 10.1002/adom.201200021 · DOI
  19. [20]Lee KT Seo S Lee JY Guo LJ Ultrathin metal-semiconductor-metal resonator for angle invariant visible band transmission filters Appl. Phys. Lett. 2014 104 231112 10.1063/1.4883494 · DOI
  20. [21]Lee KT Seo S Lee JY Guo LJ Strong resonance effect in a lossy medium-based optical cavity for angle robust spectrum filters Adv. Mater. 2014 26 6324 6328 10.1002/adma.201402117 25070749 · DOI
  21. [22]Zeng B Gao Y Bartoli FJ Ultrathin nanostructured metals for highly transmissive plasmonic subtractive color filters Sci. Rep. 2013 3 2840 10.1038/srep02840 24100869 PMC3792416 · DOI · Paper page
  22. [23]Shrestha VR Lee SS Kim ES Choi DY Aluminum plasmonics based highly transmissive polarization-independent subtractive color filters exploiting a nanopatch array Nano Lett. 2014 14 6672 6678 10.1021/nl503353z 25347210 · DOI
  23. [24]Goh XM Three-dimensional plasmonic stereoscopic prints in full colour Nat. Commun. 2014 5 5361 10.1038/ncomms6361 25369035 · DOI
  24. [25]Tan SJ Plasmonic color palettes for photorealistic printing with aluminum nanostructures Nano. Lett. 2014 14 4023 4029 10.1021/nl501460x 24926611 · DOI
  25. [26]Gu Y Zhang L Yang JKW Yeo SP Qiu CW Color generation via subwavelength plasmonic nanostructures Nanoscale 2015 7 6409 6419 10.1039/C5NR00578G 25800353 · DOI
  26. [27]Kanamori Y Shimono M Hane K Fabrication of transmission color filters using silicon subwavelength gratings on quartz substrates IEEE Photonics Technol. Lett. 2006 18 2126 2128 10.1109/LPT.2006.883208 · DOI · Paper page
  27. [28]Yoon YT Color filter incorporating a subwavelength patterned grating in poly silicon Opt. Express 2008 16 2374 2380 10.1364/OE.16.002374 18542315 · DOI
  28. [29]Cheng BH High angular tolerant color filter using subwavelength grating Appl. Phys. Lett. 2009 94 213104 10.1063/1.3139058 · DOI
  29. [30]Park H Seo K Crozier KB Adding colors to polydimethylsiloxane by embedding vertical silicon nanowires Appl. Phys. Lett. 2012 101 193107 10.1063/1.4766944 · DOI
  30. [31]Seo K Multicolored vertical silicon nanowires Nano Lett. 2011 11 1851 1856 10.1021/nl200201b 21413684 · DOI
  31. [32]Dhindsa N Saini SS Localized absorption in aluminum mask in visible spectrum due to longitudinal modes in vertical silicon nanowire arrays J. Appl. Phys. 2015 117 224302 10.1063/1.4922245 · DOI
  32. [33]Park H Filter-free image sensor pixels comprising silicon nanowires with selective color absorption Nano Lett. 2014 14 1804 1809 10.1021/nl404379w 24588103 · DOI
  33. [34]Park H Crozier KB Multispectral imaging with vertical silicon nanowires Sci. Rep. 2013 3 2460 10.1038/srep02460 23955156 PMC3746203 · DOI
  34. [35]Yang SC Richter K Fischer WJ Multicolor generation using silicon nanodisk absorber Appl. Phys. Lett. 2015 106 081112 10.1063/1.4913847 · DOI
  35. [36]Adikaari AADT Carey JD Stolojan V Keddie JL Silva SRP Bandgap enhancement of layered nanocrystalline silicon from excimer laser crystallization Nanotechnology 2006 17 5412 5416 10.1088/0957-4484/17/21/021 · DOI
  36. [37]So BS Crystallization of amorphous silicon thin films using self-limiting ALD of nickel oxide Electrochem. Solid-State Lett. 2007 10 J61 J64 10.1149/1.2666721 · DOI
  37. [38]Yue W Gao S Lee SS Kim ES Choi DY Subtractive color filters based on a silicon-aluminum hybrid-nanodisk metasurface enabling enhanced color purity Sci. Rep. 2016 6 29756 10.1038/srep29756 27407024 PMC4942830 · DOI
  38. [39]Shrestha VR Lee SS Kim ES Choi DY Non-iridescent transmissive structural color filter featuring highly efficient transmission and high excitation purity Sci. Rep. 2014 4 4921 10.1038/srep04921 24815530 PMC4017218 · DOI
  39. [40]Proust J Bedu F Gallas B Ozerov I Bonod N All-dielectric colored metasurfaces with silicon mie resonators ACS Nano 2016 10 7761 7767 10.1021/acsnano.6b03207 27458790 · DOI
  40. [41]Palik, E. D. Handbook of Optical Constants of Solids (Academic Press, 1998).
  41. [42]Lin L Yi Y Lattice plasmon resonance in core-shell Sio2/Au nanocylinder arrays Opt. Lett. 2014 39 4823 4826 10.1364/OL.39.004823 25121884 · DOI
  42. [43]Ee HS Agarwal R Tunable metasurface and flat optical zoom lens on a stretchable substrate Nano Lett. 2016 16 2818 2823 10.1021/acs.nanolett.6b00618 26986191 · DOI

Cited by

Sorted by citations

Authors
Park, C.-S., Shrestha, V. R., Yue, W., Gao, S., Lee, S.-S., Kim, E.-S., & Choi, D.-Y.
Affiliations
  • Kwangwoon University (KR)
  • Australian National University (AU)
Corresponding author
  • Lee, Sang-Shin
  • Choi, Duk-Yong
ORCID
Venue
Scientific Reports
Publisher
Springer Science and Business Media LLC
Published
2017-05-31
Volume
7
Issue
1
Pages
2556-2556
ISSN
2045-2322 (ISSN-L)
DOI
10.1038/s41598-017-02911-w
PMC
PMC5451390
OpenAlex
W2618914520
Cited by
147
References
1
Citations by year
2026: 9 · 2025: 14 · 2024: 13 · 2023: 15 · 2022: 18 · 2021: 13 · 2020: 23 · 2019: 19 · 2018: 21 · 2017: 2
FWCI
6.05
Type
journal article
Language
en
Open access
Licence
Locations
  • Scientific Reports (publishedVersion, cc-by)
  • Europe PMC (PubMed Central) (publishedVersion, other-oa)
  • PubMed Central (publishedVersion, cc-by)
  • PubMed (publishedVersion)
  • Minerva Access (University of Melbourne) (submittedVersion, cc-by)
  • DOAJ (DOAJ: Directory of Open Access Journals) (submittedVersion, cc-by-sa)
  • ANU Open Research (Australian National University) (submittedVersion, cc-by)
Funders
  • Australian National Fabrication Facility
  • National Research Foundation (2011-0030079)
  • Kwangwoon University (2011-0030079)
  • Ministry of Science, ICT and Future Planning (2011‐0030079, No. 2016R1A2B2010170)
  • National Research Foundation of Korea (2011‐0030079, No. 2016R1A2B2010170, 2016R1A2B2010170)
  • Australian Research Council (FT110100853)
Topics
  • Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photonic Crystals and Applications
  • Physical Sciences › Engineering › Biomedical Engineering › Plasmonic and Surface Plasmon Research
Keywords
dielectric metasurfaces, hydrogenated amorphous silicon, electric dipole resonance, magnetic dipole resonance, Mie scattering, surface planarization, subtractive color, color display, color printing

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