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Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications
Open accessAbstract
Aluminum nitride thin films have been grown by reactive magnetron sputter technique using a pulsed power supply. The highly (002)-textured columnar films deposited on platinized silicon substrates exhibited quasi-single-crystal piezoelectric properties. The effective d33 was measured as 3.4 pm/V, the effective e31 as 1.0 C/m2. The pyroelectric coefficient turned out to be positive (4.8 μC m−2 K−1) due to a dominating piezoelectric contribution. Thin-film bulk acoustic resonators (TFBAR) with fundamental resonance at 3.6 GHz have been fabricated to assess resonator properties. The material parameters derived from the thickness resonance were a coupling factor k=0.23 and a sound velocity vs=11 400 m/s. With a quality factor Q of 300, the TFBARs proved to be apt for filter applications. The temperature coefficient of the frequency could be tuned to practically 0 ppm/K.
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Cites
CRC Handbook of Chemistry and Physics
(2014) · doi:10.1201/b17118 · Cited by 57,706
Cited by
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Setter, N., Damjanovic, D., Eng, L., Fox, G., Gevorgian, S., Hong, S., Kingon, A., Kohlstedt, H., Park, N. Y., Stephenson, G. B., et al. (2006) · Journal of Applied Physics · doi:10.1063/1.2336999 · Cited by 1,907
PZT thin films for microsensors and actuators: Where do we stand?
Muralt, P. (2000) · IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control · doi:10.1109/58.852073 · Cited by 375
Self-citationRecent Progress in Materials Issues for Piezoelectric MEMS
Muralt, P. (2008) · Journal of the American Ceramic Society · doi:10.1111/j.1551-2916.2008.02421.x · Cited by 332
Self-citationA Review of Acoustic Impedance Matching Techniques for Piezoelectric Sensors and Transducers
Rathod, V. T. (2020) · Sensors · doi:10.3390/s20144051 · Cited by 328
Recent Progress on PZT Based Piezoelectric Energy Harvesting Technologies
Kang, M.-G., Jung, W.-S., Kang, C.-Y., & Yoon, S.-J. (2016) · Actuators · doi:10.3390/act5010005 · Cited by 273
Metadata
- Authors
- Dubois, M.-A., & Muralt, P.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1999-05-17
- Volume
- 74
- Issue
- 20
- Pages
- 3032-3034
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2041690766
- Cited by
- 436
- References
- 1
- FWCI
- 7.36
- Type
- journal article
- Language
- en
- Open access
- green
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