The DOI matches its Crossref record; 27 of the 27 references it cites were found in a registry or an index.
PZT thin films for microsensors and actuators: Where do we stand?
Open accessAbstract
This paper reviews deposition, integration, and device fabrication of PbZr(x)Ti(1-x)O(3) (PZT) films for applications in micro-electromechanical systems. An ultrasonic micromotor is described as an example. A summary of the published data on piezoelectric properties is given. The figures of merit for various applications are discussed. Some considerations and results on operation, reliability, and depolarization of PZT thin films are presented. The state of the art allows some preliminary conclusions.
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Cites
Acoustic Fields and Waves in Solids
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Dielectric properties of fine-grained barium titanate ceramics
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Effect of Mechanical Boundary Conditions on Phase Diagrams of Epitaxial Ferroelectric Thin Films
Pertsev, N. A., Zembilgotov, A. G., & Tagantsev, A. K. (1998) · Physical Review Letters · doi:10.1103/physrevlett.80.1988 · Cited by 1,632
Fundamentals on Piezoelectricity
Arnau, A., & Soares, D. (2004) · Piezoelectric Transducers and Applications · doi:10.1007/978-3-662-05361-4_1 · Cited by 682
Measurement of piezoelectric coefficients of ferroelectric thin films
Lefki, K., & Dormans, G. J. M. (1994) · Journal of Applied Physics · doi:10.1063/1.357693 · Cited by 593
Dubois, M.-A., & Muralt, P. (1999) · Applied Physics Letters · doi:10.1063/1.124055 · Cited by 436
Self-citation御子柴, 宣. (1974) · 日本物理學會誌 · Cited by 420
Ferroelectric La-Sr-Co-O/Pb-Zr-Ti-O/La-Sr-Co-O heterostructures on silicon via template growth
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Cited by
Hammock, M. L., Chortos, A., Tee, B. C. ‐., Tok, J. B. ‐., & Bao, Z. (2013) · Advanced Materials · doi:10.1002/adma.201302240 · Cited by 2,396
Ledermann, N., Muralt, P., Baborowski, J., Gentil, S., Mukati, K., Cantoni, M., Seifert, A., & Setter, N. (2003) · Sensors and Actuators A: Physical · doi:10.1016/s0924-4247(03)00090-6 · Cited by 395
Self-citation
Metadata
- Authors
- Muralt, P.
- Venue
- IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
- Published
- 2000-07
- Volume
- 47
- Issue
- 4
- Pages
- 903-915
- ISSN
- 0885-3010 (ISSN-L)
- OpenAlex
- W2162372488
- Cited by
- 375
- References
- 27
- FWCI
- 8.49
- Type
- journal article
- Language
- en
- Open access
- green
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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