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The Theoretical Resolution Limit of the Electron Microscope

Scherzer, O.·1949·Journal of Applied Physics

Abstract

The resolving power of the electron microscope and the contrast in the image are calculated for different conditions of focusing, illumination and aperture. These conditions can change the limit of resolution by a factor of about 3. The contrast in the image of an atom is appreciably increased by defocusing and spherical aberration. Nevertheless, the contrast improves when the numerical value of the aberration constant is diminished. The effect of different methods of spherical correction is discussed briefly.

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Metadata

Authors
Scherzer, O.
Venue
Journal of Applied Physics
Published
1949-01-01
Volume
20
Issue
1
Pages
20-29
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
OpenAlex
W2048380342
Cited by
915
References
0
FWCI
2.79
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: The Theoretical Resolution Limit of the Electron Microscope. https://app.cochat.ai/papers/10.1063/1.1698233
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Scherzer, O. (1949). The Theoretical Resolution Limit of the Electron Microscope. Journal of Applied Physics. https://doi.org/10.1063/1.1698233

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.