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A printable form of silicon for high performance thin film transistors on plastic substrates
Abstract
Free-standing micro- and nanoscale objects of single crystal silicon can be fabricated from silicon-on-insulator wafers by lithographic patterning of resist, etching of the exposed top silicon, and removing the underlying SiO2 to lift-off the remaining silicon. A large collection of such objects constitutes a type of material that can be deposited and patterned, by dry transfer printing or solution casting, onto plastic substrates to yield mechanically flexible thin film transistors that have excellent electrical properties. Effective mobilities of devices built with this material, which we refer to as microstructured silicon (μs-Si), are demonstrated to be as high as 180cm2∕Vs on plastic substrates. This form of “top down” microtechnology might represent an attractive route to high performance flexible electronic systems.
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Citations
Cited by
Technologies for Printing Sensors and Electronics Over Large Flexible Substrates: A Review
Khan, S., Lorenzelli, L., & Dahiya, R. S. (2015) · IEEE Sensors Journal · doi:10.1109/jsen.2014.2375203 · Cited by 1,225
Inorganic Semiconductors for Flexible Electronics
Sun, Y., & Rogers, J. A. (2007) · Advanced Materials · doi:10.1002/adma.200602223 · Cited by 874
Self-citationUltra-thin chips for high-performance flexible electronics
Gupta, S., Navaraj, W. T., Lorenzelli, L., & Dahiya, R. (2018) · npj Flexible Electronics · doi:10.1038/s41528-018-0021-5 · Cited by 363
Macroelectronics: Perspectives on Technology and Applications
Reuss, R. H., Chalamala, B. R., Moussessian, A., Kane, M. G., Kumar, A., Zhang, D. C., Rogers, J. A., Hatalis, M., Temple, D., Moddel, G., et al. (2005) · Proceedings of the IEEE · doi:10.1109/jproc.2005.851237 · Cited by 359
Self-citationNovel Light Source Integration Approaches for Silicon Photonics
Wang, Z., Abbasi, A., Dave, U., De Groote, A., Kumari, S., Kunert, B., Merckling, C., Pantouvaki, M., Shi, Y., Tian, B., et al. (2017) · Laser & Photonics Reviews · doi:10.1002/lpor.201700063 · Cited by 213
Metadata
- Authors
- Menard, E., Lee, K. J., Khang, D.-Y., Nuzzo, R. G., & Rogers, J. A.
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2004-06-28
- Volume
- 84
- Issue
- 26
- Pages
- 5398-5400
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2168341111
- Cited by
- 372
- References
- 0
- FWCI
- 23.54
- Type
- journal article
- Language
- en
- Open access
- closed
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- Menard, E., Lee, K. J., Khang, D.-Y., Nuzzo, R. G., & Rogers, J. A. (2004). A printable form of silicon for high performance thin film transistors on plastic substrates. Applied Physics Letters. https://doi.org/10.1063/1.1767591
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