Study of thermomechanical properties of Si∕SiGe superlattices using femtosecond transient thermoreflectance technique
Abstract
Using a Femtosecond Transient Thermoreflectance (FTT) technique, we studied the thermomechanical properties of two Si∕SiGe superlattices. A theoretical model is presented which agrees well with the experimental results and allows us to determine the cross-plan thermal conductivity of the superlattices at room temperature. We also show that, from the experimental curve, we can extract the thickness of the metallic film, the longitudinal sound velocity and the refractive index of the superlattice using acoustic echoes and Brillouin oscillation data.
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The thermal conductivity of superlattices and nanolaminates has been extensively characterized using TDTR over the last 15 years.
“The thermal conductivity of superlattices and nanolaminates 27, 59, 78, 79, 123, 132-138 (see Figure 6(b) for an example) has been extensively characterized using TDTR over the last 15 years.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [133]
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- Authors
- Ezzahri, Y., Dilhaire, S., Grauby, S., Rampnoux, J. M., Claeys, W., Zhang, Y., Zeng, G., & Shakouri, A.
- Affiliations
- Université de Bordeaux (FR)
- University of California, Santa Cruz (US)
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2005-08-31
- Volume
- 87
- Issue
- 10
- Pages
- 103506 (1-3)
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2029137366
- Cited by
- 24
- References
- 17
- Citations by year
- 2026: 1 · 2020: 1 · 2019: 1 · 2018: 2 · 2017: 1 · 2015: 1 · 2014: 1 · 2013: 2
- FWCI
- 1.42
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- HAL (submittedVersion)
- Oskar-Bordeaux (Universite de Bordeaux) (submittedVersion)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Semiconductor materials and interfaces
- Keywords
- Si/SiGe superlattices, thermomechanical properties, through-plane thermal conductivity, acoustic echoes, longitudinal sound velocity, refractive index
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