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On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses

Bonse, Jörn, Rosenfeld, Arkadi, Krüger, Jörg·2009·Journal of Applied Physics

Abstract

The formation of nearly wavelength-sized laser-induced periodic surface structures (LIPSSs) on single-crystalline silicon upon irradiation with single or multiple femtosecond-laser pulses (pulse duration τ=130 fs and central wavelength λ=800 nm) in air is studied experimentally and theoretically. In our theoretical approach, we model the LIPSS formation by combining the generally accepted first-principles theory of Sipe and co-workers with a Drude model in order to account for transient intrapulse changes in the optical properties of the material due to the excitation of a dense electron-hole plasma. Our results are capable to explain quantitatively the spatial periods of the LIPSSs being somewhat smaller than the laser wavelength, their orientation perpendicular to the laser beam polarization, and their characteristic fluence dependence. Moreover, evidence is presented that surface plasmon polaritons play a dominant role during the initial stage of near-wavelength-sized periodic surface structures in femtosecond-laser irradiated silicon, and it is demonstrated that these LIPSSs can be formed in silicon upon irradiation by single femtosecond-laser pulses.

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Metadata

Authors
Bonse, J., Rosenfeld, A., & Krüger, J.
Venue
Journal of Applied Physics
Published
2009-11-15
Volume
106
Issue
10
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
OpenAlex
W2017469904
Cited by
654
References
14
FWCI
19.90
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses. https://app.cochat.ai/papers/10.1063/1.3261734
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Bonse, J., Rosenfeld, A., & Krüger, J. (2009). On the role of surface plasmon polaritons in the formation of laser-induced periodic surface structures upon irradiation of silicon by femtosecond-laser pulses. Journal of Applied Physics. https://doi.org/10.1063/1.3261734

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