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Secondary electron emission in the scanning electron microscope
Abstract
This paper surveys experimental results concerned with secondary electron emission of surfaces bombarded by primary electrons with respect to scanning electron microscopy. The energy distribution, the angular distribution, and the yield of secondary electrons from metals and insulators are reviewed as well as the escape depth of the secondary electrons and the contribution of the backscattered electrons to the secondary electron yield. The different detectors for secondary electrons in the scanning electron microscope are described. The contrast mechanisms in the scanning electron microscope, material, topography, voltage, magnetic, and crystallographic orientation contrast based on secondary electron emission, as well as the lateral resolution, depending among other things on the spatial distribution of the emitted secondary electrons, are discussed.
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Citations
Cited by
Secondary electron emission from dielectric materials of a Hall thruster with segmented electrodes
Dunaevsky, A., Raitses, Y., & Fisch, N. J. (2003) · Physics of Plasmas · doi:10.1063/1.1568344 · Cited by 157
On secondary electron emission and its semi-empirical description
Tolias, P. (2014) · Plasma Physics and Controlled Fusion · doi:10.1088/0741-3335/56/12/123002 · Cited by 58
Jousten, K., Boineau, F., Bundaleski, N., Illgen, C., Setina, J., Teodoro, O. M. N. D., Vicar, M., & Wüest, M. (2020) · Vacuum · doi:10.1016/j.vacuum.2020.109545 · Cited by 34
Chang, H.-Y., Alvarado, A., Weber, T., & Marian, J. (2019) · Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms · doi:10.1016/j.nimb.2019.05.079 · Cited by 15
Metadata
- Authors
- Seiler, H.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 1983-11-01
- Volume
- 54
- Issue
- 11
- Pages
- R1-R18
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2017007572
- Cited by
- 1,026
- References
- 0
- FWCI
- 4.47
- Type
- journal article
- Language
- en
- Open access
- closed
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