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Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers

Chen, G. Y., Thundat, T., Wachter, E. A., Warmack, R. J.·1995·Journal of Applied Physics

Abstract

It is well known that bimetallic microcantilevers can exhibit static deflection as a result of thermal effects, including exothermic adsorption of chemicals on their surfaces. It is shown here that the resonance frequency of a cantilever can change due to a combination of mass loading and change of spring constant resulting from adsorption of chemicals on the surface. Cantilevers also undergo static bending that is induced by differential surface stress. The magnitude of these effects depends upon the chemical properties of the surface and upon the amount of material adsorbed. Hence cantilever deflection as well as resonance frequency change can be used as the basis for development of novel chemical sensors.

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Metadata

Authors
Chen, G. Y., Thundat, T., Wachter, E. A., & Warmack, R. J.
Venue
Journal of Applied Physics
Published
1995-04-15
Volume
77
Issue
8
Pages
3618-3622
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
OpenAlex
W1968514543
Cited by
539
References
0
FWCI
7.19
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers. https://app.cochat.ai/papers/10.1063/1.359562
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Chen, G. Y., Thundat, T., Wachter, E. A., & Warmack, R. J. (1995). Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers. Journal of Applied Physics. https://doi.org/10.1063/1.359562

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