Dual-resonator Lamb wave strain sensor with temperature compensation and enhanced sensitivity
Abstract
In this letter, we demonstrate a high-temperature dual-resonator Lamb wave tensile strain sensor which can achieve temperature compensation in a wide temperature range and has high strain sensitivities. This sensor consists of two identical AlN-on-SOI Lamb wave resonators (LWRs) adhered on a uniaxial tensile plate, with the wave propagating directions in the two LWRs parallel and perpendicular to the tensile axis, respectively. The most obvious higher-order Lamb wave modes, i.e., the A4, S4, and S5 modes, in the “parallel” LWR present high strain sensitivities of 0.229 ppm/με (196 Hz/με), 0.480 ppm/με (431 Hz/με), and 0.222 ppm/με (205 Hz/με) all with minus signs, whereas in the “perpendicular” LWR, they demonstrate smaller strain sensitivities all with plus signs. The S4 modes in the two LWRs have almost the same temperature coefficients. Based on the experimental results, a generally applicable beat frequency method with these two LWRs is proposed to realize temperature compensation as well as the high-sensitivity strain measurement.
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Acoustic wave devices based on the piezoelectric effect, semiconductor metal oxide sensors, and two-dimensional materials are representative methods for VOC detection using electrical signal output.
“Representative methods include acoustic wave devices (AWDs) based on the piezoelectric effect (Chen et al. 2018; Dou et al. 2018; Zhang et al. 2018), semiconductor metal oxide (Lin et al. 2019), and two-dimensional materials (Sun et al. 2018).”
From Artificial intelligence enhanced sensors - enabling technologies to next-generation healthcare and biomedical platform (2023) · cites this paper as Dou et al. 2018
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- Authors
- Dou, S., Cao, J., Zhou, H., Chen, C., Wang, Y., Yang, J., Wang, D., Shang, Z., & Mu, X.
- Affiliations
- Chongqing University (CN)
- Key Laboratory of Optoelectronic Technology & Systems, Ministry of Education and International R & D Center of Micro-Nano Systems and New Materials Technology, Chongqing University 1 , Chongqing 400044, China
- Leibniz Institute for High Performance Microelectronics (DE)
- China Electronics Technology Group Corporation (CN)
- Corresponding author
- Shang, Zhengguo
- Mu, Xiaojing
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2018-08-27
- Volume
- 113
- Issue
- 9
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2889267154
- Cited by
- 23
- References
- 17
- Citations by year
- 2026: 2 · 2025: 6 · 2024: 4 · 2023: 4 · 2022: 4 · 2021: 3
- FWCI
- 0.30
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- Funders
- Key Technology Innovation Projects of Key Industries in Chongqing (cstc2016zdcy-ztzx0034)
- National Key Research and Development Program of China (2016YFB0402702)
- the
- National Natural Science Foundation of China (51605060)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Acoustic Wave Resonator Technologies
- Physical Sciences › Engineering › Mechanics of Materials › Ultrasonics and Acoustic Wave Propagation
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Fiber Optic Sensors
- Keywords
- Lamb wave resonators, strain sensors, temperature compensation, piezoelectric resonators, high-temperature sensing, sensitivity enhancement
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