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Cited by 12Acoustic Wave Resonator TechnologiesUltrasonics and Acoustic Wave PropagationMicrowave and Dielectric Measurement Techniques

Temperature decoupled viscosity-density product measurement in liquid by utilizing a dual-mode AlN-based acoustic wave resonator

Zhang, Feng, Chen, Cong, Dou, Shaoxu, Zhou, Hong, Yang, Jing, Wang, Dengpan, Chen, Yu, Cheng, Yuhua +2 more·2018·Applied Physics Letters
DOI 10.1063/1.5047658
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Abstract

In this letter, we report a two-in-one acoustic wave resonator with Rayleigh and Lamb modes for temperature decoupled viscosity-density product sensing. The Lamb mode of the resonator is sensitive to both the viscosity-density product and the ambient temperature, while the Rayleigh mode only responds to the ambient temperature and is not affected by liquid properties. These unique characteristics of the two modes are due to the different spatial distributions of the acoustic energy. Taking advantage of the aforementioned features, a beat frequency strategy is proposed to decouple the temperature influence from the viscosity-density product measurement, thus realizing temperature independent viscosity-density product sensing in a single acoustic wave resonator chip. Experimental results show that the accurate measurement of the viscosity-density product can be achieved in Newtonian liquids with a sensitivity of −0.36 MHz/kg m−2 s−0.5 within a wide temperature range from 20 °C to 80 °C. Our work holds great promise for liquid property measurement occasions with large fluctuations in ambient temperature, such as oil and gas exploration, automobile, and aeronautic applications.

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  • Acoustic wave devices based on the piezoelectric effect, semiconductor metal oxide sensors, and two-dimensional materials are representative methods for VOC detection using electrical signal output.

    “Representative methods include acoustic wave devices (AWDs) based on the piezoelectric effect (Chen et al. 2018; Dou et al. 2018; Zhang et al. 2018), semiconductor metal oxide (Lin et al. 2019), and two-dimensional materials (Sun et al. 2018).”

    From Artificial intelligence enhanced sensors - enabling technologies to next-generation healthcare and biomedical platform (2023) · cites this paper as Zhang et al. 2018

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Authors
Zhang, F., Chen, C., Dou, S., Zhou, H., Yang, J., Wang, D., Chen, Y., Cheng, Y., Shang, Z., & Mu, X.
Affiliations
Agency for Science, Technology and Research (SG)
Corresponding author
  • Shang, Zhengguo
  • Mu, Xiaojing
ORCID
Venue
Applied Physics Letters
Publisher
AIP Publishing
Published
2018-11-12
Volume
113
Issue
20
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
DOI
10.1063/1.5047658
OpenAlex
W2901562116
Cited by
12
References
22
Citations by year
2025: 3 · 2024: 1 · 2023: 2 · 2022: 4 · 2021: 1 · 2019: 1
FWCI
0.20
Type
journal article
Language
en
Open access
closed
Locations
Applied Physics Letters (publishedVersion)
Funders
  • National Key Research and Development Program of China (2016YFB0402702)
  • National Natural Science Foundation of China (51605060)
Topics
  • Physical Sciences › Engineering › Biomedical Engineering › Acoustic Wave Resonator Technologies
  • Physical Sciences › Engineering › Mechanics of Materials › Ultrasonics and Acoustic Wave Propagation
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Microwave and Dielectric Measurement Techniques
Keywords
acoustic wave resonators, Rayleigh mode, Lamb modes, dual-mode resonator, beat frequency, Newtonian fluid

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