The DOI matches its Crossref record.
Stresses and deformation processes in thin films on substrates
Abstract
The stresses that develop in thin films on substrates can be detrimental to the reliability of thin film electronic devices. In order to design these devices for improved mechanical reliability, an understanding of the origin of these stresses and the controlling deformation processes in thin films is needed. This review begins with a discussion of the basic techniques used for measuring stresses in thin films and for studying the mechanical properties of thin films. The proposed models for the origin of stresses in thin films are then reviewed. Finally, the effects of microstructure and substrate constraint on thin film deformation processes are discussed.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cited by
Mei, Y., Huang, G., Solovev, A. A., Ureña, E. B., Mönch, I., Ding, F., Reindl, T., Fu, R. K. Y., Chu, P. K., & Schmidt, O. G. (2008) · Advanced Materials · doi:10.1002/adma.200801589 · Cited by 658
The intrinsic stress of polycrystalline and epitaxial thin metal films
Koch, R. (1994) · Journal of Physics: Condensed Matter · doi:10.1088/0953-8984/6/45/005 · Cited by 451
Kinetic Model for Dependence of Thin Film Stress on Growth Rate, Temperature, and Microstructure
Chason, E., Shin, J. W., Hearne, S. J., & Freund, L. B. (2012) · Journal of Applied Physics · doi:10.1063/1.4704683 · Cited by 134
A Kinetic Model for Stress Generation in Thin Films Grown from Energetic Vapor Fluxes
Chason, E., Karlson, M., Colin, J. J., Magnfält, D., Sarakinos, K., & Abadias, G. (2016) · Journal of Applied Physics · doi:10.1063/1.4946039 · Cited by 90
Metadata
- Authors
- Doerner, M. F., & Nix, W. D.
- Venue
- Critical Reviews in Solid State and Materials Sciences
- Publisher
- Informa UK Limited
- Published
- 1988-01
- Volume
- 14
- Issue
- 3
- Pages
- 225-268
- ISSN
- 0161-1593 (ISSN-L)
- 1040-8436
- 1547-6561
- OpenAlex
- W2061976368
- Cited by
- 617
- References
- 0
- FWCI
- 18.20
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Stresses and deformation processes in thin films on substrates. https://app.cochat.ai/papers/10.1080/10408438808243734
- The paper
- Doerner, M. F., & Nix, W. D. (1988). Stresses and deformation processes in thin films on substrates. Critical Reviews in Solid State and Materials Sciences. https://doi.org/10.1080/10408438808243734
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
