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Stable glow plasma at atmospheric pressure
Abstract
A stable glow plasma at atmospheric pressure has been achieved for plasma treatment under selected conditions, for example the structure of electrodes, the kind of dilute gas, and the frequency of power. The surface fluorination of PET film and carbon thin-film deposition by such a plasma is described here. The surface energy can be controlled by plasma treatment of various concentrations (O 2 /CF 4 /He) in the same way as the lower pressure method that has been reported by Kogoma and co-workers (1987). Active species in plasma are identified by emission spectroscopy.
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Citations
Cited by
Laroussi, M. (2002) · IEEE Transactions on Plasma Science · doi:10.1109/tps.2002.804220 · Cited by 760
Arc‐Free Atmospheric Pressure Cold Plasma Jets: A Review
Laroussi, M., & Akan, T. (2007) · Plasma Processes and Polymers · doi:10.1002/ppap.200700066 · Cited by 699
Cold Plasma in Medicine and Healthcare: The New Frontier in Low Temperature Plasma Applications
Laroussi, M. (2020) · Frontiers in Physics · doi:10.3389/fphy.2020.00074 · Cited by 319
Yang, R.-F., Geng, L.-L., Lu, H.-Q., & Fan, X.-D. (2017) · Ultrasonics Sonochemistry · doi:10.1016/j.ultsonch.2016.06.037 · Cited by 83
Metadata
- Authors
- Kanazawa, S., Kogoma, M., Moriwaki, T., & Okazaki, S.
- Venue
- Journal of Physics D: Applied Physics
- Publisher
- IOP Publishing
- Published
- 1988-05-14
- Volume
- 21
- Issue
- 5
- Pages
- 838-840
- ISSN
- 0022-3727 (ISSN-L)
- 1361-6463
- OpenAlex
- W1967968691
- Cited by
- 697
- References
- 0
- FWCI
- 1.17
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Stable glow plasma at atmospheric pressure. https://app.cochat.ai/papers/10.1088/0022-3727/21/5/028
- The paper
- Kanazawa, S., Kogoma, M., Moriwaki, T., & Okazaki, S. (1988). Stable glow plasma at atmospheric pressure. Journal of Physics D: Applied Physics. https://doi.org/10.1088/0022-3727/21/5/028
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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