Characterization of Hafnium Oxide Thin Films Prepared by Electron Beam Evaporation
Abstract
Thin films of hafnium oxide were deposited by electron beam evaporation. The effects of the substrate temperature and the oxygen partial pressure on the refractive index and carbon monoxide sensing properties of the films were studied. The films were characterized using x-ray diffraction and x-ray photoelectron spectroscopy techniques. Films deposited on unheated substrates were amorphous, whereas those deposited on heated substrates showed a mixture of amorphous and polycrystalline structure. All the films were found to be optically inhomogeneous. The inhomogeneity of the films was taken into account in the determination of their refractive indices. It was found that the porosity (as reflected by the refractive indices) of the films was the main factor that affected the sensitivity of the films in relation to their detection of carbon monoxide.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
HfO2 has a high refractive index, wide transparency from the UV to mid-IR region (bandgap larger than 5.5 eV), and significant thermal and chemical stability.
“Its high refractive index, wide transparency from UV to mid-IR region (due to its bandgap, which is larger than 5.5 eV [64]) and significant thermal and chemical stability [65] propelled HfO2 for the manufacture of antireflective coatings [66] and highly reflective mirrors [67], but also in other applications, such as memory devices [68], among others [69,70].”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [64]
Cites
Optical properties of thin solid films
Jolliffee, K. H. (1954) · Vacuum · doi:10.1016/0042-207x(54)90274-2 · Cited by 1,102 · see citing works
Chemical vapor deposition and characterization of HfO2 films from organo-hafnium compounds
Balog, M., Schieber, M. M., Michman, M., et al. (1977) · Thin Solid Films · doi:10.1016/0040-6090(77)90312-1 · Cited by 356 · see citing works
Colouration of tungsten oxide films: A model for optically active coatings
Bange, K. (1999) · Solar Energy Materials and Solar Cells · doi:10.1016/s0927-0248(98)00196-2 · Cited by 291 · see citing works
Multiple determination of the optical constants of thin-film coating materials
Arndt, D. P., Azzam, R. M. A., Bennett, J. M., et al. (1984) · Applied Optics · doi:10.1364/ao.23.003571 · Cited by 235 · see citing works
Ritala, M., Leskelä, M. A., Niinistö, L., et al. (1994) · Thin Solid Films · doi:10.1016/0040-6090(94)90168-6 · Cited by 203 · see citing works
Morphology and crystallization kinetics in HfO2 thin films grown by atomic layer deposition
Ho, M.-Y., Gong, H., Wilk, G. D., et al. (2003) · Journal of Applied Physics · doi:10.1063/1.1534381 · Cited by 183 · see citing works
Automatic determination of the optical constants of inhomogeneous thin films
Borgogno, J. P., Lazaridès, B., & Pelletier, E. P. (1982) · Applied Optics · doi:10.1364/ao.21.004020 · Cited by 168 · see citing works
Gas sensing properties of thin- and thick-film tin-oxide materials
Becker, T., Ahlers, S., Bosch-v.Braunmühl, C., et al. (2001) · Sensors and Actuators B Chemical · doi:10.1016/s0925-4005(01)00672-4 · Cited by 165 · see citing works
The relationship between optical inhomogeneity and film structure
Harris, M., MacLeod, H. A., Ogura, S., et al. (1979) · Thin Solid Films · doi:10.1016/0040-6090(79)90425-5 · Cited by 163 · see citing works
Optical properties and environmental stability of oxide coatings deposited by reactive sputtering
Edlou, S. M., Smajkiewicz, A., & Al-Jumaily, G. A. (1993) · Applied Optics · doi:10.1364/ao.32.005601 · Cited by 124 · see citing works
Reactive evaporation of low-defect density hafnia
Chow, R., Falabella, S., Loomis, G. E., et al. (1993) · Applied Optics · doi:10.1364/ao.32.005567 · Cited by 111 · see citing works
Optical and microstructural properties of hafnium dioxide thin films
Lehan, J. P., Mao, Y., Bovard, B. G., et al. (1991) · Thin Solid Films · doi:10.1016/0040-6090(91)90131-g · Cited by 101 · see citing works
Study of HfO2 films prepared by ion-assisted deposition using a gridless end-hall ion source
Gilo, M., & Croitoru, N. I. (1999) · Thin Solid Films · doi:10.1016/s0040-6090(99)00226-6 · Cited by 95 · see citing works
Alvisi, M., Scaglione, S., Martelli, S., et al. (1999) · Thin Solid Films · doi:10.1016/s0040-6090(99)00534-9 · Cited by 85 · see citing works
Physical characterization of hafnium oxide thin films and their application as gas sensing devices
Capone, S., Leo, G., Rella, R., et al. (1998) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/1.580999 · Cited by 84 · see citing works
Thickness and microstructure effects on alcohol sensing of tin oxide thin films
Park, S., & Mackenzie, J. D. (1996) · Thin Solid Films · doi:10.1016/0040-6090(95)07075-3 · Cited by 83 · see citing works
Use of hafnium dioxide in multilayer dielectric reflectors for the near uv
Baumeister, P. W., & Arnon, O. (1977) · Applied Optics · doi:10.1364/ao.16.000439 · Cited by 55 · see citing works
Physicochemical properties of HfO2 in response to rapid thermal anneal
Lysaght, P. S., Foran, B. J., Bersuker, G. I., et al. (2003) · Applied Physics Letters · doi:10.1063/1.1553998 · Cited by 53 · see citing works
Determination of average refractive index of thin CeO2films with large inhomogeneities
Khawaja, E. E., Durrani, S. M. A., & Al-Kuhaili, M. F. (2003) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/36/5/319 · Cited by 32 · see citing works
Self-citationThe determination of the refractive index and thickness of a transparent film
Khawaja, E. E. (1976) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/9/14/003 · Cited by 32 · see citing works
Self-citationDefect formation in hafnium dioxide thin films
Reicher, D. W., Black, P., & Jungling, K. C. (2000) · Applied Optics · doi:10.1364/ao.39.001589 · Cited by 29 · see citing works
Adamik, M., Barna, P. B., Tomov, I., et al. (1994) · physica status solidi (a) · doi:10.1002/pssa.2211450207 · Cited by 19 · see citing works
Khawaja, E. E., Durrani, S. M. A., & Daous, M. A. (1999) · Journal of Physics D Applied Physics · doi:10.1088/0022-3727/32/4/006 · Cited by 10 · see citing works
Self-citation
Flagged first, then by citations
Cited by
Sorted by citations
Gier, C., Ben Yaala, M., Wiseman, C., MacFoy, S., Chicoine, M., Schiettekatte, F., Hough, J., Rowan, S., Martin, I., MacKay, P., et al. (2023) · Thin Solid Films · doi:10.1016/j.tsf.2023.139781 · Cited by 17 · see citing works
Metal Oxide Thin Films for Advanced Photonic Applications
Stîngescu, M.-L., Șopronyi, M.-A., Antohe, Ș., & Scărișoreanu, N.-D. (2026) · Crystals · doi:10.3390/cryst16030164 · Cited by 2 · see citing works
- Authors
- Al-Kuhaili, M. F., Durrani, S. M. A., & Khawaja, E. E.
- Affiliations
- King Fahd University of Petroleum and Minerals (SA)
- ORCID
- Al-Kuhaili, M F
- Venue
- Journal of Physics D: Applied Physics
- Publisher
- IOP Publishing
- Published
- 2004-03-31
- Volume
- 37
- Issue
- 8
- Pages
- 1254-1261
- ISSN
- 0022-3727 (ISSN-L)
- 1361-6463
- OpenAlex
- W2077926730
- Cited by
- 55
- References
- 23
- Citations by year
- 2026: 1 · 2025: 1 · 2024: 1 · 2023: 6 · 2022: 5 · 2021: 3 · 2020: 5 · 2019: 1 · 2018: 5 · 2017: 3 · 2016: 1 · 2015: 5 · 2014: 3 · 2013: 4 · 2012: 2
- FWCI
- 0.98
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Physics D Applied Physics (publishedVersion)
- Funders
- King Fahd University of Petroleum and Minerals
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Gas Sensing Nanomaterials and Sensors
- Physical Sciences › Materials Science › Polymers and Plastics › Transition Metal Oxide Nanomaterials
- Physical Sciences › Materials Science › Materials Chemistry › Advanced Materials and Semiconductor Technologies
- Keywords
- hafnium oxide thin films, electron beam evaporation, substrate temperature, oxygen partial pressure, refractive index, carbon monoxide detection, gas sensors, film porosity, optical inhomogeneity
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
