Micro-Raman thermometry of thermal flexure actuators
Open accessAbstract
Micro-Raman spectroscopy has proven to be a valuable tool for obtaining temperature measurements in active semiconductor and MEMS devices. By using the temperature-calibrated response of the polysilicon Raman signature, we have obtained spatially resolved temperature measurements of U-shaped electro-thermal actuators. Both the peak position and the line width of the characteristic Raman peak have been used as temperature metrics. The measured thermal profiles are further compared to numerical models of the electro-thermal response of the devices as designed and fabricated. The obtained thermal profiles are in qualitative agreement with published modeled thermal profiles of similar devices and are within 15 °C of our modeled profiles. These measurements represent the first reported experimental temperature profile measurements for flexure type actuators and can be used to validate the existing models. Moreover, the comparison of line width and position-based temperatures are in good agreement, differing slightly over the flexure regions of the device.
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Agreement among SSERT measurements, comparison to Raman thermometry, and continuum multiphysics modeling provides confidence in the SSERT measurements and repeatability across test structures.
“The agreement amongst SSERT measurements, along with comparison to Raman thermometry [37,38] measurements and continuum multiphysics modeling not presented here, provides confidence in the SSERT measurements and repeatability across test structures.”
From Mean Free Path Effects on the Experimentally Measured Thermal Conductivity of Single-Crystal Silicon Microbridges (2013) · cites this paper as [37]
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Self-citation
- Authors
- Serrano, J. R., Phinney, L. M., & Kearney, S. P.
- Affiliations
- Sandia National Laboratories (US)
- ORCID
- Kearney, S P
- Venue
- Journal of Micromechanics and Microengineering
- Publisher
- IOP Publishing
- Published
- 2006-04-28
- Volume
- 16
- Issue
- 7
- Pages
- 1128-1134
- ISSN
- 0960-1317 (ISSN-L)
- 1361-6439
- OpenAlex
- W2106363289
- Cited by
- 38
- References
- 16
- Citations by year
- 2024: 2 · 2021: 2 · 2020: 2 · 2019: 2 · 2017: 4 · 2013: 3 · 2012: 3
- FWCI
- 6.41
- Type
- journal article
- Language
- en
- Open access
- bronze
- doi.org
- Locations
- Journal of Micromechanics and Microengineering (publishedVersion)
- Funders
- U.S. Department of Energy (DE–AC04–94AL85000, AC04-94AL85000)
- National Nuclear Security Administration (DE-AC04- 94AL85000)
- Laboratory Directed Research and Development (DE-AC04–94AL85000)
- Sandia National Laboratories (94AL85000, DEAC04-94AL85000, AC04-94AL85000)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Life Sciences › Biochemistry, Genetics and Molecular Biology › Biophysics › Spectroscopy Techniques in Biomedical and Chemical Research
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Mechanical and Optical Resonators
- Keywords
- electrothermal actuator, temperature profile measurement, Raman peak position
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