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Vibration energy harvesting with aluminum nitride-based piezoelectric devices
Open accessAbstract
This paper describes the measurement results of piezoelectric energy harvesters with aluminum nitride (AlN) as a piezoelectric material. AlN was chosen for its material properties and for its well-known sputter deposition process. For AlN devices a high optimum load resistance is required, which is favorable due to the high resulting voltage level. The output power harvested from mechanical vibrations has been measured on micromachined harvesters with different geometries. The resonance frequencies ranged from 200 up to 1200 Hz. The packaged devices had limited output powers and quality factors due to air damping caused by the package. A maximum output power of 60 µW has been measured on an unpackaged device at an acceleration of 2.0 g and at a resonance frequency of 572 Hz. The package of the harvester requires special attention, since air damping can significantly decrease the maximum power output.
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Citations
Cites
Energy harvesting vibration sources for microsystems applications
Beeby, S. P., Tudor, M. J., & White, N. M. (2006) · Measurement Science and Technology · doi:10.1088/0957-0233/17/12/r01 · Cited by 3,008
Cited by
A review of piezoelectric energy harvesting based on vibration
Kim, H. S., Kim, J.-H., & Kim, J. (2011) · International Journal of Precision Engineering and Manufacturing · doi:10.1007/s12541-011-0151-3 · Cited by 1,121
Micro electrostatic energy harvester with both broad bandwidth and high normalized power density
Zhang, Y., Wang, T., Luo, A., Hu, Y., Li, X., & Wang, F. (2018) · Applied Energy · doi:10.1016/j.apenergy.2017.12.053 · Cited by 423
Liu, H., Tay, C. J., Quan, C., Kobayashi, T., & Lee, C. (2011) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2011.2162488 · Cited by 361
Piezoelectric MEMS for energy harvesting
Kim, S.-G., Priya, S., & Kanno, I. (2012) · MRS Bulletin · doi:10.1557/mrs.2012.275 · Cited by 320
Designing and manufacturing a piezoelectric tile for harvesting energy from footsteps
Hwang, S. J., Jung, H. J., Kim, J. H., Ahn, J. H., Song, D., Song, Y., Lee, H. L., Moon, S. P., Park, H., & Sung, T. H. (2015) · Current Applied Physics · doi:10.1016/j.cap.2015.02.009 · Cited by 92
Metadata
- Authors
- Elfrink, R., Kamel, T. M., Goedbloed, M., Matova, S., Hohlfeld, D., van Andel, Y., & van Schaijk, R.
- Venue
- Journal of Micromechanics and Microengineering
- Publisher
- IOP Publishing
- Published
- 2009-08-26
- Volume
- 19
- Issue
- 9
- Pages
- 094005
- ISSN
- 0960-1317 (ISSN-L)
- 1361-6439
- OpenAlex
- W1978972366
- Cited by
- 460
- References
- 1
- FWCI
- 53.91
- Type
- journal article
- Language
- en
- Open access
- bronze
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- Elfrink, R., Kamel, T. M., Goedbloed, M., Matova, S., Hohlfeld, D., van Andel, Y., & van Schaijk, R. (2009). Vibration energy harvesting with aluminum nitride-based piezoelectric devices. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/19/9/094005
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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