The DOI matches its Crossref record; 47 of the 47 references it cites were found in a registry or an index.
Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power
Abstract
A piezoelectric MEMS energy harvester (EH) with low resonant frequency and wide operation bandwidth was designed, microfabricated, and characterized. The MEMS piezoelectric energy harvesting cantilever consists of a silicon beam integrated with piezoelectric thin film (PZT) elements parallel-arranged on top and a silicon proof mass resulting in a low resonant frequency of 36 Hz. The whole chip was assembled onto a metal carrier with a limited spacer such that the operation frequency bandwidth can be widened to 17 Hz at the input acceleration of 1.0 g during frequency up-sweep. Load voltage and power generation for different numbers of PZT elements in series and in parallel connections were compared and discussed based on experimental and simulation results. Moreover, the EH device has a wideband and steadily increased power generation from 19.4 nW to 51.3 nW within the operation frequency bandwidth ranging from 30 Hz to 47 Hz at 1.0 g. Based on theoretical estimation, a potential output power of 0.53 μW could be harvested from low and irregular frequency vibrations by adjusting the PZT pattern and spacer thickness to achieve an optimal design.
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Cites
Energy harvesting vibration sources for microsystems applications
Beeby, S. P., Tudor, M. J., & White, N. M. (2006) · Measurement Science and Technology · doi:10.1088/0957-0233/17/12/r01 · Cited by 3,008
A study of low level vibrations as a power source for wireless sensor nodes
Roundy, S., Wright, P. K., & Rabaey, J. (2003) · Computer Communications · doi:10.1016/s0140-3664(02)00248-7 · Cited by 2,819
A review of power harvesting using piezoelectric materials (2003–2006)
Anton, S. R., & Sodano, H. A. (2007) · Smart Materials and Structures · doi:10.1088/0964-1726/16/3/r01 · Cited by 2,652
Energy Harvesting From Human and Machine Motion for Wireless Electronic Devices
Mitcheson, P. D., Yeatman, E. M., Rao, G. K., Holmes, A. S., & Green, T. C. (2008) · Proceedings of the IEEE · doi:10.1109/jproc.2008.927494 · Cited by 1,888
A piezoelectric vibration based generator for wireless electronics
Roundy, S., & Wright, P. K. (2004) · Smart Materials and Structures · doi:10.1088/0964-1726/13/5/018 · Cited by 1,818
Erturk, A., & Inman, D. J. (2009) · Smart Materials and Structures · doi:10.1088/0964-1726/18/2/025009 · Cited by 1,417
Analysis of a micro-electric generator for microsystems
Williams, C. B., & Yates, R. B. (1996) · Sensors and Actuators A: Physical · doi:10.1016/0924-4247(96)80118-x · Cited by 1,407
Cook-Chennault, K. A., Thambi, N., & Sastry, A. M. (2008) · Smart Materials and Structures · doi:10.1088/0964-1726/17/4/043001 · Cited by 1,241
Improving Power Output for Vibration-Based Energy Scavengers
Roundy, S., Leland, E. S., Baker, J., Carleton, E., Reilly, E., Lai, E., Otis, B., Rabaey, J. M., Sundararajan, V., & Wright, P. K. (2005) · IEEE Pervasive Computing · doi:10.1109/mprv.2005.14 · Cited by 1,031
Human-powered wearable computing
Starner, T. (1996) · IBM Systems Journal · doi:10.1147/sj.353.0618 · Cited by 876
Cited by
Recent Progress on PZT Based Piezoelectric Energy Harvesting Technologies
Kang, M.-G., Jung, W.-S., Kang, C.-Y., & Yoon, S.-J. (2016) · Actuators · doi:10.3390/act5010005 · Cited by 273
Shi, Q., Wang, T., & Lee, C. (2016) · Scientific Reports · doi:10.1038/srep24946 · Cited by 210
Self-citationShi, Q., Wang, T., Kobayashi, T., & Lee, C. (2016) · Applied Physics Letters · doi:10.1063/1.4948973 · Cited by 54
Self-citationLu, L., He, Y., Wang, T., Shi, T., & Ruan, Y. (2019) · IEEE Access · doi:10.1109/access.2019.2936228 · Cited by 35
Metadata
- Authors
- Liu, H., Tay, C. J., Quan, C., Kobayashi, T., & Lee, C.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2011-10
- Volume
- 20
- Issue
- 5
- Pages
- 1131-1142
- ISSN
- 1057-7157 (ISSN-L)
- 1941-0158
- OpenAlex
- W2167187517
- Cited by
- 361
- References
- 47
- FWCI
- 50.09
- Type
- journal article
- Language
- en
- Open access
- closed
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- Liu, H., Tay, C. J., Quan, C., Kobayashi, T., & Lee, C. (2011). Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power. Journal of Microelectromechanical Systems. https://doi.org/10.1109/jmems.2011.2162488
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