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Microflow devices and systems
Abstract
Microflow devices including microvalves, micropumps and microflow sensors fabricated by micromachining are reviewed from the point of view of the actuating principle and structures. Integration of microflow control devices and microflow sensors allowed very precise control of small flow. High performance liquid dosing microsystems and sophisticated chemical analysing microsystems were demonstrated by the combination of microflow devices and microsensors. Applications of microflow devices and systems are also introduced.
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Citations
Cited by
Soft Lithography in Biology and Biochemistry
Whitesides, G. M., Ostuni, E., Takayama, S., Jiang, X., & Ingber, D. E. (2001) · Annual Review of Biomedical Engineering · doi:10.1146/annurev.bioeng.3.1.335 · Cited by 2,607
Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications
Mark, D., Haeberle, S., Roth, G., von Stetten, F., & Zengerle, R. (2010) · Chemical Society Reviews · doi:10.1039/b820557b · Cited by 1,647
A controlled-release microchip
Santini, J. T., Cima, M. J., & Langer, R. (1999) · Nature · doi:10.1038/16898 · Cited by 868
Disposable Smart Lab on a Chip for Point-of-Care Clinical Diagnostics
Ahn, C. H., Choi, J.-W., Beaucage, G., Nevin, J., Lee, J.-B., Puntambekar, A., & Lee, R. J. Y. (2004) · Proceedings of the IEEE · doi:10.1109/jproc.2003.820548 · Cited by 504
Fabrication and characterization of electroosmotic micropumps
Zeng, S., Chen, C.-H., Mikkelsen, J. C., & Santiago, J. G. (2001) · Sensors and Actuators B: Chemical · doi:10.1016/s0925-4005(01)00855-3 · Cited by 403
Metadata
- Authors
- Shoji, S., & Esashi, M.
- Venue
- Journal of Micromechanics and Microengineering
- Publisher
- IOP Publishing
- Published
- 1994-12-01
- Volume
- 4
- Issue
- 4
- Pages
- 157-171
- ISSN
- 0960-1317 (ISSN-L)
- 1361-6439
- OpenAlex
- W2019014472
- Cited by
- 495
- References
- 0
- FWCI
- 5.47
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Microflow devices and systems. https://app.cochat.ai/papers/10.1088/0960-1317/4/4/001
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- Shoji, S., & Esashi, M. (1994). Microflow devices and systems. Journal of Micromechanics and Microengineering. https://doi.org/10.1088/0960-1317/4/4/001
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
