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Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons
Abstract
We review the data and models describing the production of the electrons, termed secondary electrons, that initiate the secondary and subsequent feedback avalanches required for the growth of current during breakdown and for the maintenance of low-current, cold-cathode discharges in argon. First we correlate measurements of the production of secondary electrons at metallic cathodes, i.e. the yields of electrons induced by Ar + ions, fast Ar atoms, metastable atoms and vuv photons. The yields of electrons per ion, fast atom and photon vary greatly with particle energy and surface condition. Then models of electron, ion, fast atom, excited atom and photon transport and kinetics are fitted to electrical-breakdown and low-current, discharge-maintenance data to determine the contributions of various cathode-directed species to the secondary electron production. Our model explains measured breakdown and low-current discharge voltages for Ar over a very wide range of electric field to gas density ratios E / n , i.e. 15 Td to 100 kTd. We review corrections for nonequilibrium electron motion near the cathode that apply to our local-field model of these discharges. Analytic expressions for the cross sections and reaction coefficients used by this and related models are summarized.
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Cites
Handbook of Mathematical Functions
McQuarrie, D. A. (1966) · American Journal of Physics · doi:10.1119/1.1972842 · Cited by 40,433
Principles of Plasma Discharges and Materials Processing
Lieberman, M. A., & Lichtenberg, A. J. (2005) · doi:10.1002/0471724254 · Cited by 4,748
Cited by
Vladimirov, S. V., & Ostrikov, K. (2004) · Physics Reports · doi:10.1016/j.physrep.2003.12.003 · Cited by 332
eduPIC: An introductory particle based code for radio-frequency plasma simulation
Donkó, Z., Derzsi, A., Vass, M., Horváth, B., Wilczek, S., Hartmann, B., & Hartmann, P. (2021) · Plasma Sources Science and Technology · doi:10.1088/1361-6595/ac0b55 · Cited by 91
Bogaerts, A., & Gijbels, R. (2002) · Plasma Sources Science and Technology · doi:10.1088/0963-0252/11/1/303 · Cited by 72
Reactive HiPIMS Deposition of SiO2/Ta2O5 Optical Interference Filters
Hála, M., Vernhes, R., Zabeida, O., Klemberg-Sapieha, J.-E., & Martinu, L. (2014) · Journal of Applied Physics · doi:10.1063/1.4903285 · Cited by 51
Jousten, K., Boineau, F., Bundaleski, N., Illgen, C., Setina, J., Teodoro, O. M. N. D., Vicar, M., & Wüest, M. (2020) · Vacuum · doi:10.1016/j.vacuum.2020.109545 · Cited by 34
Metadata
- Authors
- Phelps, A. V., & Petrovic, Z. L.
- Venue
- Plasma Sources Science and Technology
- Publisher
- IOP Publishing
- Published
- 1999-01-01
- Volume
- 8
- Issue
- 3
- Pages
- R21-R44
- ISSN
- 0963-0252 (ISSN-L)
- OpenAlex
- W2017981825
- Cited by
- 905
- References
- 2
- FWCI
- 18.69
- Type
- journal article
- Language
- en
- Open access
- closed
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- Phelps, A. V., & Petrovic, Z. L. (1999). Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons. Plasma Sources Science and Technology. https://doi.org/10.1088/0963-0252/8/3/201
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