Cited by 34Metamaterials and Metasurfaces ApplicationsAdvanced Antenna and Metasurface TechnologiesAdvanced Materials and Mechanics

Reconfigurable metasurfaces with mechanical actuations: towards flexible and tunable photonic devices

Open access
Guanxing, Zang, Liu, Ziji, Deng, Wenjun, Zhu, Weiming·2021·Journal of Optics

Abstract

Flexible and tunable devices have, for decades, been the subject of many research areas, including, integrated systems, flexible electronics and photonics, which are calling for advanced properties of materials. Metasurfaces with designable optical properties have now been intensively studied for flexible photonic devices. Enabled by microelectromechanical systems (MEMS) and microfluidic technologies, reconfigurable metasurfaces base on mechanical actuations offer new approaches for flexible and tunable devices. In this view, we introduce metasurfaces based on MEMS actuations, droplets arrays, flexible substrates and microfluidic systems together with their applications on flexible and tunable devices.

The claims and statistics of this paper haven’t been checked yet.

Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.

A few free checks a day · papers already verified open instantly · results are public

Integrity signals

Registry

Crossref · 10.1088/2040-8986/abcc52

Cites

3 of 3 references verified0 citation errors · 0 not checkable

Statistics

Claims the paper makes

The claims and statistics of this paper haven’t been checked yet.

Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.

A few free checks a day · papers already verified open instantly · results are public

Claims other papers make about this one

Each is checked against this paper’s own text: does it say what the citing paper says it does?

  • RIS can manipulate the radio propagation environment on demand by intelligently coordinating the amplitude and phase shifts of incident electromagnetic waves through a large number of low-cost, quasi-passive reflecting elements.

    “By intelligently coordinating the amplitude and phase shifts of incident EM waves through a large number of low-cost, quasi-passive reflecting elements, RIS can manipulate the radio propagation environment on demand [21].”

    From Emerging Technologies in Intelligent Metasurfaces: Shaping the Future of Wireless Communications (2026) · cites this paper as [21]

    The Introduction (page unavailable in our copy) says metasurfaces can control the phase and amplitude of incident electromagnetic waves and are built from meta-atoms. It does not establish the more specific claim that an RIS uses low-cost, quasi-passive reflecting elements to manipulate a radio propagation environment on demand. (LLM, conf=0.85)

    Experimental — accuracy not yet measured
  • Substantial research has demonstrated that RIS provides unprecedented performance gains for enhancing the capacity and coverage of wireless networks in a cost-effective and energy-efficient manner.

    “In past years, substantial research efforts have demonstrated the unprecedented performance gains of RIS for enhancing the capacity and coverage of wireless networks in a cost-effective and energy-efficient manner [20]-[22].”

    From Emerging Technologies in Intelligent Metasurfaces: Shaping the Future of Wireless Communications (2026) · cites this paper as [21]

    The Introduction and Section 2 discuss flexible photonic devices and tunable electromagnetic properties of metasurfaces; Section 4.1 reports RF absorption. Searches for RIS, wireless-network capacity and coverage, and cost or energy efficiency found no passage in our copy addressing the claimed network-performance gains. (LLM, conf=0.76)

    Experimental — accuracy not yet measured

Self-check

Percentages, sums and reported differences re-computed from the paper’s own numbers.

The self-check needs the paper’s full text.

Cites

Flagged first, then by citations

Research works printed but not linked: 161

  1. Liu Y et al 2016 Epidermal mechano-acoustic sensing electronics for cardiovascular diagnostics and human-machine interfaces Sci. Adv. 2 e1601185 · DOI · Paper page
  2. Viventi J et al 2011 Flexible, foldable, actively multiplexed, high-density electrode array for mapping brain activity in vivo Nat. Neurosci. 14 1599-605 · DOI · Paper page
  3. Dinh T, Phan H-P, Nguyen T-K, Qamar A, Foisal A R M, Nguyen Viet T, Tran C-D, Zhu Y, Nguyen N-T and Dao D V 2016 Environment-friendly carbon nanotube based flexible electronics for noninvasive and wearable healthcare J. Mater. Chem. C 4 10061-8 · DOI
  4. Sheng L, Teo S and Liu J 2016 Liquid-metal-painted stretchable capacitor sensors for wearable healthcare electronics J Med Biol Eng 36 265-72 · DOI
  5. Xu X, Peng B, Li D, Zhang J, Wong L M, Zhang Q, Wang S and Xiong Q 2011 Flexible visible-infrared metamaterials and their applications in highly sensitive chemical and biological sensing Nano Lett. 11 3232-8 · DOI
  6. Yamamoto Y, Yamamoto D, Takada M, Naito H, Arie T, Akita S and Takei K 2017 Efficient skin temperature sensor and stable gel-less sticky ECG sensor for a wearable flexible healthcare patch Adv. Healthc. Mater. 6 4338 · DOI
  7. Zhu J, Wang Z, Lin S, Jiang S, Liu X and Guo S 2020 Low-cost flexible plasmonic nanobump metasurfaces for label-free sensing of serum tumor marker Biosens. Bioelectron. 150 111905 · DOI
  8. Zeng W, Shu L, Li Q, Chen S, Wang F and Tao X-M 2014 Fiber-based wearable electronics: a review of materials, fabrication, devices, and applications Adv. Mater. 26 5310-36 · DOI
  9. Son D et al 2014 Multifunctional wearable devices for diagnosis and therapy of movement disorders Nat. Nanotechnol. 9 397-404 · DOI · Paper page
  10. Gao W, Ota H, Kiriya D, Takei K and Javey A 2019 Flexible electronics toward wearable sensing Acc. Chem. Res. 52 523-33 · DOI
  11. Liao X, Zhang Z, Liao Q, Liang Q, Ou Y, Xu M, Li M, Zhang G and Zhang Y 2016 Flexible and printable paper-based strain sensors for wearable and large-area green electronics Nanoscale 8 13025-32 · DOI
  12. Tian X, Lee P M, Tan Y J, Wu T L Y, Yao H, Zhang M, Li Z, Ng K A, Tee B C K and Ho J S 2019 Wireless body sensor networks based on metamaterial textiles Nat. Electron. 2 243-51 · DOI
  13. Van den Brand J, de Kok M, Koetse M, Cauwe M, Verplancke R, Bossuyt F, Jablonski M and Vanfleteren J 2015 Flexible and stretchable electronics for wearable health devices Solid State Electron. 113 116-20 · DOI
  14. Wang J, Li X, Zi Y, Wang S, Li Z, Zheng L, Yi F, Li S and Wang Z L 2015 A flexible fiber-based supercapacitor-triboelectric-nanogenerator power system for wearable electronics Adv. Mater. 27 4830-6 · DOI
  15. Fan Z, Ho J C, Takahashi T, Yerushalmi R, Takei K, Ford A C, Chueh Y-L and Javey A 2009 Toward the development of printable nanowire electronics and sensors Adv. Mater. 21 3730-43 · DOI
  16. Sekitani T and Someya T 2010 Stretchable, large-area organic electronics Adv. Mater. 22 2228-46 · DOI
  17. Rogers J A, Someya T and Huang Y 2010 Materials and mechanics for stretchable electronics Science 327 1603 · DOI
  18. Sun Y and Rogers J A 2007 Inorganic semiconductors for flexible electronics Adv. Mater. 19 1897-916 · DOI
  19. Jung Y H et al 2015 High-performance green flexible electronics based on biodegradable cellulose nanofibril paper Nat. Commun. 6 7170 · DOI
  20. Linghu C, Zhang S, Wang C and Song J 2018 Transfer printing techniques for flexible and stretchable inorganic electronics NPJ Flex. Electron. 2 26 · DOI
  21. Li L, Zou Y, Lin H, Hu J, Sun X, Feng -N-N, Danto S, Richardson K, Gu T and Haney M 2013 A fully-integrated flexible photonic platform for chip-to-chip optical interconnects J. Lightwave Technol. 31 4080-6 · DOI
  22. Xu X, Subbaraman H, Hosseini A, Lin C-Y, Kwong D and Chen R T 2012 Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration Opt. Lett. 37 1020-2 · DOI
  23. Fan L, Varghese L T, Xuan Y, Wang J, Niu B and Qi M 2012 Direct fabrication of silicon photonic devices on a flexible platform and its application for strain sensing Opt. Express 20 20564-75 · DOI
  24. Williams Q L, Liu X, Walters W, Zhou J-G, Edwards T Y, Smith F L, Williams G E and Mosley B L 2007 Boron-doped carbon nanotube coating for transparent, conducting, flexible photonic devices Appl. Phys. Lett. 91 143116 · DOI
  25. Li L, Lin H, Qiao S, Zou Y, Danto S, Richardson K, Musgraves J D, Lu N and Hu J 2014 Integrated flexible chalcogenide glass photonic devices Nat. Photon. 8 643-9 · DOI
  26. Li L et al 2018 Monolithically integrated stretchable photonics Light Sci. Appl. 7 17138-17138 · DOI
  27. White M S et al 2013 Ultrathin, highly flexible and stretchable PLEDs Nat. Photon. 7 811-6 · DOI
  28. Hu J, Li L, Lin H, Zhang P, Zhou W and Ma Z 2013 Flexible integrated photonics: where materials, mechanics and optics meet Opt. Mater. Express 3 1313-31 · DOI
  29. Li L, Lin H, Michon J, Huang Y, Li J, Du Q, Yadav A, Richardson K, Gu T and Hu J 2017 A new twist on glass: a brittle material enabling flexible integrated photonics Int. J. Appl. Glass Sci. 8 61-68 · DOI
  30. Fudouzi H and Sawada T 2006 Photonic rubber sheets with tunable color by elastic deformation Langmuir 22 1365-8 · DOI
  31. Wang S et al 2017 Broadband achromatic optical metasurface devices Nat. Commun. 8 187 · DOI
  32. Lin D, Fan P, Hasman E and Brongersma M L 2014 Dielectric gradient metasurface optical elements Science 345 298 · DOI · Paper page
  33. Jahani S and Jacob Z 2016 All-dielectric metamaterials Nat. Nanotechnol. 11 23-36 · DOI
  34. Smith D R, Pendry J B and Wiltshire M C K 2004 Metamaterials and negative refractive index Science 305 788 · DOI
  35. Zheludev N I and Kivshar Y S 2012 From metamaterials to metadevices Nat. Mater. 11 917-24 · DOI
  36. Shalaev V M 2007 Optical negative-index metamaterials Nat. Photon. 1 41-48 · DOI
  37. Cui T J, Qi M Q, Wan X, Zhao J and Cheng Q 2014 Coding metamaterials, digital metamaterials and programmable metamaterials Light Sci. Appl. 3 e218 · DOI · Paper page
  38. Poddubny A, Iorsh I, Belov P and Kivshar Y 2013 Hyperbolic metamaterials Nat. Photon. 7 948-57 · DOI · Paper page
  39. Li L, Jun Cui T, Ji W, Liu S, Ding J, Wan X, Bo Li Y, Jiang M, Qiu C-W and Zhang S 2017 Electromagnetic reprogrammable coding-metasurface holograms Nat. Commun. 8 197 · DOI
  40. Lapine M, Shadrivov L V, Powell D A and Kivshar Y S 2012 Magnetoelastic metamaterials Nat. Mater. 11 30-33 · DOI
  41. Chen H, Chan C T and Sheng P 2010 Transformation optics and metamaterials Nat.Mater. 9 387-96 · DOI
  42. Sun F, Zheng B, Chen H, Jiang W, Guo S, Liu Y, Ma Y and He S 2017 Transformation optics: from classic theory and applications to its new branches Laser Photon. Rev. 11 1700034 · DOI
  43. Talebi N, Meuret S, Guo S, Hentschel M, Polman A, Giessen H and van Aken P A 2019 Merging transformation optics with electron-driven photon sources Nat. Commun. 10 599 · DOI
  44. Wan X, Xiang Jiang W, Feng M H and Jun Cui T 2014 A broadband transformation-optics metasurface lens Appl. Phys. Lett. 104 151601 · DOI
  45. Aubry A, Lei D Y, Maier S A and Pendry J B 2010 Interaction between plasmonic nanoparticles revisited with transformation optics Phys. Rev. Lett. 105 233901 · DOI
  46. Yang Y, Liu A Q, Chin L K, Zhang X M, Tsai D P, Lin C L, Lu C, Wang G P and Zheludev N I 2012 Optofluidic waveguide as a transformation optics device for lightwave bending and manipulation Nat. Commun. 3 651 · DOI
  47. Roberts D A, Kundtz N and Smith D R 2009 Optical lens compression via transformation optics Opt. Express 17 16535-42 · DOI
  48. Kundtz N B, Smith D R and Pendry J B 2011 Electromagnetic design with transformation optics Proc. IEEE Inst. Electr. Electron. Eng. 99 1622-33 · DOI
  49. Huidobro P A, Nesterov M L, Martín-Moreno L and García-Vidal F J 2010 Transformation optics for plasmonics Nano Lett. 10 1985-90 · DOI
  50. Pendry J B, Aubry A, Smith D R and Maier S A 2012 Transformation optics and subwavelength control of light Science 337 549 · DOI
  51. Kildishev A V and Shalaev V M 2008 Engineering space for light via transformation optics Opt. Lett. 33 43-45 · DOI
  52. Vakil A and Engheta N 2011 Transformation optics using graphene Science 332 1291 · DOI
  53. Zhu W M et al 2011 Switchable magnetic metamaterials using micromachining processes Adv. Mater. 23 1792-6 · DOI
  54. Lapine M, Powell D, Gorkunov M, Shadrivov I, Marqués R and Kivshar Y 2009 Structural tunability in metamaterials Appl. Phys. Lett. 95 084105 · DOI
  55. Liu A Q, Zhu W M, Tsai D P and Zheludev N I 2012 Micromachined tunable metamaterials: a review J. Opt. 14 114009 · DOI
  56. Zhu W M, Liu A Q, Bourouina T, Tsai D P, Teng J H, Zhang X H, Lo G Q, Kwong D L and Zheludev N I 2012 Microelectromechanical maltese-cross metamaterial with tunable terahertz anisotropy Nat. Commun. 3 1274 · DOI
  57. Zhu W M et al 2011 Polarization dependent state to polarization independent state change in THz metamaterials Appl. Phys. Lett. 99 221102 · DOI
  58. Pryce I M, Aydin K, Kelaita Y A, Briggs R M and Atwater H A 2010 Highly strained compliant optical metamaterials with large frequency tunability Nano Lett. 10 4222-7 · DOI
  59. Xiong K, Tordera D, Emilsson G, Olsson O, Linderhed U, Jonsson M P and Dahlin A B 2017 Switchable plasmonic metasurfaces with high chromaticity containing only abundant metals Nano Lett. 17 7033-9 · DOI
  60. Aksu S, Huang M, Artar A, Yanik A A, Selvarasah S, Dokmeci M R and Altug H 2011 Flexible plasmonics on unconventional and nonplanar substrates Adv. Mater. 23 4422-30 · DOI · Paper page
  61. Ee H S and Agarwal R 2016 Tunable metasurface and flat optical zoom lens on a stretchable substrate Nano Lett. 16 2818-23 · DOI
  62. She A, Zhang S, Shian S, Clarke D R and Capasso F 2018 Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift Sci. Adv. 4 eaap9957 · DOI
  63. Tao H, Strikwerda A C, Fan K, Padilla W J, Zhang X and Averitt R D 2009 Reconfigurable terahertz metamaterials Phys. Rev. Lett. 103 147401 · DOI
  64. Han Z, Kohno K, Fujita H, Hirakawa K and Toshiyoshi H 2014 MEMS reconfigurable metamaterial for terahertz switchable filter and modulator Opt. Express 22 21326-39 · DOI
  65. Zhao X, Schalch J, Zhang J, Seren H R, Duan G, Averitt R D and Zhang X 2018 Electromechanically tunable metasurface transmission waveplate at terahertz frequencies Optica 5 303 · DOI
  66. Fu Y H et al 2011 A micromachined reconfigurable metamaterial via reconfiguration of asymmetric split-ring resonators Adv. Funct. Mater. 21 3589-94 · DOI
  67. Zhao X, Fan K, Zhang J, Keiser G R, Duan G, Averitt R D and Zhang X 2016 Voltage-tunable dual-layer terahertz metamaterials Microsyst. Nanoeng. 2 16025 · DOI
  68. Saito M, Maruyama A and Fujiwara J 2015 Polarization-independent refractive-index change of a cholesteric liquid crystal Opt. Mater. Express 5 1588 · DOI
  69. Lee Y U, Kim J and Wu J W 2015 Electro-optic switching in metamaterial by liquid crystal Nano Converg. 2 23 · DOI
  70. Ding F, Yang Y and Bozhevolnyi S I 2019 Dynamic metasurfaces using phase-change chalcogenides Adv. Opt. Mater. 7 1801709 · DOI
  71. Qu Y, Li Q, Cai L and Qiu M 2018 Polarization switching of thermal emissions based on plasmonic structures incorporating phase-changing material Ge2Sb2Te5 Opt. Mater. Express 8 2312 · DOI
  72. Buchnev O, Podoliak N, Kaczmarek M, Zheludev N I and Fedotov V A 2015 Electrically controlled nanostructured metasurface loaded with liquid crystal: toward multifunctional photonic switch Adv. Opt. Mater. 3 674-9 · DOI
  73. Shen Z, Zhou S, Ge S, Duan W, Ma L, Lu Y and Hu W 2019 Liquid crystal tunable terahertz lens with spin-selected focusing property Opt. Express 27 8800-7 · DOI
  74. Abass A, Rodriguez S R-K, Ako T, Aubert T, Verschuuren M, Van Thourhout D, Beeckman J, Hens Z, Gómez Rivas J and Maes B 2014 Active liquid crystal tuning of metallic nanoantenna enhanced light emission from colloidal quantum dots Nano Lett. 14 5555-60 · DOI
  75. Zhao Y, Zhang Y, Shi Q, Liang S, Huang W, Kou W and Yang Z 2018 Dynamic photoinduced controlling of the large phase shift of terahertz waves via vanadium dioxide coupling nanostructures ACS Photon. 5 3040-50 · DOI
  76. Yin X, Steinle T, Huang L, Taubner T, Wuttig M, Zentgraf T and Giessen H 2017 Beam switching and bifocal zoom lensing using active plasmonic metasurfaces Light Sci. Appl. 6 e17016 · DOI
  77. Rios C, Hosseini P, Taylor R A and Bhaskaran H 2016 Color depth modulation and resolution in phase-change material nanodisplays Adv. Mater. 28 4720-6 · DOI
  78. Odit M, Kapitanova P, Andryieuski A, Belov P and Lavrinenko A V 2016 Experimental demonstration of water based tunable metasurface Appl. Phys. Lett. 109 011901 · DOI
  79. Yoo Y J, Ju S, Park S Y, Ju Kim Y, Bong J, Lim T, Kim K W, Rhee J Y and Lee Y 2015 Metamaterial absorber for electromagnetic waves in periodic water droplets Sci. Rep. 5 14018 · DOI
  80. Song Q et al 2017 Water-resonator-based metasurface: an ultrabroadband and near-unity absorption Adv. Opt. Mater. 5 1601103 · DOI · Paper page
  81. Zhu W et al 2015 A flat lens with tunable phase gradient by using random access reconfigurable metamaterial Adv. Mater. 27 4739-43 · DOI
  82. Song Q H et al 2019 Split Archimedean spiral metasurface for controllable GHz asymmetric transmission Appl. Phys. Lett. 114 151105 · DOI
  83. Serita K, Matsuda E, Okada K, Murakami H, Kawayama I and Tonouchi M 2018 Invited Article: terahertz microfluidic chips sensitivity-enhanced with a few arrays of meta-atoms APL Photon. 3 051603 · DOI
  84. Wu P C, Zhu W, Shen Z X, Chong P H J, Ser W, Tsai D P and Liu A-Q 2017 Broadband wide-angle multifunctional polarization converter via liquid-metal-based metasurface Adv. Opt. Mater. 5 1600938 · DOI
  85. Sun S, Yang W, Zhang C, Jing J, Gao Y, Yu X, Song Q and Xiao S 2018 Real-time tunable colors from microfluidic reconfigurable all-dielectric metasurfaces ACS Nano 12 2151-9 · DOI
  86. Chen X and Fan W 2019 Toroidal metasurfaces integrated with microfluidic for terahertz refractive index sensing J. Phys. D: Appl. Phys. 52 485104 · DOI
  87. Xu S et al 2019 Biocompatible soft fluidic strain and force sensors for wearable devices Adv. Funct. Mater. 29 1807058 · DOI
  88. Jiang Q, Qian Y, Ma J, Ma X, Cheng Q and Wei F 2019 User centric three-factor authentication protocol for cloud-assisted wearable devices Int. J. Commun. Syst. 32 e3900 · DOI
  89. Jiang Z H, Brocker D E, Sieber P E and Werner D H 2014 A compact, low-profile metasurface-enabled antenna for wearable medical body-area network devices IEEE Trans. Antennas Propag. 62 4021-30 · DOI
  90. Kwak S I, Sim D-U, Kwon J H and Yoon Y J 2017 Design of PIFA with metamaterials for body-sar reduction in wearable applications IEEE Trans. Electromagn. Compat. 59 297-300 · DOI
  91. Tak J and Choi J 2017 A wearable metamaterial microwave absorber IEEE Antennas Wirel. Propag. Lett. 16 784-7 · DOI
  92. Yan S and Vandenbosch G A E 2016 Radiation pattern-reconfigurable wearable antenna based on metamaterial structure IEEE Antennas Wirel. Propag. Lett. 15 1715-8 · DOI
  93. Wu K, Coquet P, Wang Q J and Genevet P 2018 Modelling of free-form conformal metasurfaces Nat. Commun. 9 3494 · DOI
  94. Yang S, Liu P, Yang M, Wang Q, Song J and Dong L 2016 From flexible and stretchable meta-atom to metamaterial: a wearable microwave meta-skin with tunable frequency selective and cloaking effects Sci. Rep. 6 21921 · DOI
  95. Saadatnejad S, Oveisi M and Hashemi M 2020 LSTM-based ECG classification for continuous monitoring on personal wearable devices IEEE J. Biomed. Health Inform. 24 515-23 · DOI
  96. Tseng M L, Hsiao -H-H, Chu C H, Chen M K, Sun G, Liu A-Q and Tsai D P 2018 Metalenses: advances and applications Adv. Opt. Mater. 6 1800554 · DOI
  97. Shrestha S, Overvig A C, Lu M, Stein A and Yu N 2018 Broadband achromatic dielectric metalenses Light. Sci. Appl. 7 85 · DOI
  98. Lin R J et al 2019 Achromatic metalens array for full-colour light-field imaging Nat. Nanotechnol. 14 227-31 · DOI
  99. Artar A, Yanik A A and Altug H 2011 Multispectral plasmon induced transparency in coupled meta-atoms Nano Lett. 11 1685-9 · DOI
  100. Chong K E et al 2016 Efficient polarization-insensitive complex wavefront control using Huygens' metasurfaces based on dielectric resonant meta-atoms ACS Photon. 3 514-9 · DOI
  101. Liu W 2016 Optical resonance problem in metamaterial arrays: a lattice dynamics approach J. Phys. Condes. Matter 28 475401 · DOI
  102. Meaud J 2020 Nonlinear wave propagation and dynamic reconfiguration in two-dimensional lattices with bistable elements J. Sound Vib. 473 115239 · DOI
  103. Meinzer N, Barnes W L and Hooper I R 2014 Plasmonic meta-atoms and metasurfaces Nat. Photon. 8 889-98 · DOI
  104. Nemati A, Wang Q, Hong M and Teng J 2018 Tunable and reconfigurable metasurfaces and metadevices Opto-electron. Adv. 1 18000901-25 · DOI
  105. Powell D A 2014 Resonant dynamics of arbitrarily shaped meta-atoms Phys. Rev. B 90 075108 · DOI
  106. Rockstuhl C, Menzel C, Mühlig S, Petschulat J, Helgert C, Etrich C, Chipouline A, Pertsch T and Lederer F 2011 Scattering properties of meta-atoms Phys. Rev. B 83 245119 · DOI
  107. Yang Y, Kravchenko I I, Briggs D P and Valentine J 2014 All-dielectric metasurface analogue of electromagnetically induced transparency Nat. Commun. 5 5753 · DOI
  108. Zhengli H, Kohno K, Fujita H, Hirakawa K and Toshiyoshi H 2015 Tunable terahertz filter and modulator based on electrostatic MEMS reconfigurable SRR array IEEE J. Sel. Top. Quant. 21 114-22 · DOI
  109. Chen W T, Zhu A Y, Sanjeev V, Khorasaninejad M, Shi Z, Lee E and Capasso F 2018 A broadband achromatic metalens for focusing and imaging in the visible Nat. Nanotechnol. 13 220-6 · DOI
  110. Huang Y, Vasan A S S, Doraiswami R, Osterman M and Pecht M 2012 MEMS reliability review IEEE Trans. Device Mater. Reliab. 12 482-93 · DOI
  111. Judy J W 2001 Microelectromechanical systems (MEMS): fabrication, design and applications Smart Mater. Struct. 10 1115-34 · DOI
  112. Tan Y, Dong Y and Wang X 2017 Review of MEMS electromagnetic vibration energy harvester J. Microelectromech. Syst. 26 1-16 · DOI
  113. Liu C 2007 Recent developments in polymer MEMS Adv. Mater. 19 3783-90 · DOI
  114. Totsu K, Moriyama M and Esashi M 2019 MEMS research is better together Nat. Electron. 2 134-6 · DOI
  115. Boyd-moss M, Baratchi S, Di Venere M and Khoshmanesh K 2016 Self-contained microfluidic systems: a review Lab Chip 16 3177-92 · DOI
  116. Zhang Y and Jiang H R 2016 A review on continuous-flow microfluidic PCR in droplets: advances, challenges and future Anal. Chim. Acta. 914 7-16 · DOI
  117. Karle M, Vashist S K, Zengerle R and von Stetten F 2016 Microfluidic solutions enabling continuous processing and monitoring of biological samples: a review Anal. Chim. Acta. 929 1-22 · DOI
  118. Xu C and Xie T 2017 Review of microfluidic liquid-liquid extractors Ind. Eng. Chem. Res. 56 7593-622 · DOI
  119. Song Y, Zhang J and Li D 2017 Microfluidic and nanofluidic resistive pulse sensing: a review Micromachines 8 204 · DOI
  120. Aiello M D, Backer A S, Sapon A J, Smits J, Perreault J D, Llull P and Acosta V M 2019 Achromatic varifocal metalens for the visible spectrum ACS Photon. 6 2432-40 · DOI
  121. Bai W, Yang P, Huang J, Chen D, Zhang J, Zhang Z, Yang J and Xu B 2020 Author Correction: near-infrared tunable metalens based on phase change material Ge 2 Sb 2 Te 5 Sci. Rep. 10 3325 · DOI
  122. Ma X, Guo Y, Pu M, Jin J, Gao P, Li X and Luo X 2020 Tunable optical hooks in the visible band based on ultra-thin metalenses Ann. Phys. 532 1900396 · DOI
  123. Yilmaz N, Ozdemir A, Ozer A and Kurt H 2019 Rotationally tunable polarization-insensitive single and multifocal metasurface J. Opt. 21 045105 · DOI
  124. Chen K et al 2017 A Reconfigurable active Huygens' metalens Adv. Mater. 29 1606422 · DOI
  125. Iyer P P, DeCrescent R A, Lewi T, Antonellis N and Schuller J A 2018 Uniform thermo-optic tunability of dielectric metalenses Phys. Rev. Appl. 10 044029 · DOI
  126. Arbabi E, Arbabi A, Kamali S M, Horie Y, Faraji-Dana M and Faraon A 2018 MEMS-tunable dielectric metasurface lens Nat. Commun. 9 812 · DOI
  127. Naqvi A H and Lim S 2019 A beam-steering antenna with a fluidically programmable metasurface IEEE Trans. Antennas Propag. 67 3704-11 · DOI
  128. Komar A, Paniagua-Domínguez R, Miroshnichenko A, Yu Y F, Kivshar Y S, Kuznetsov A I and Neshev D 2018 Dynamic beam switching by liquid crystal tunable dielectric metasurfaces ACS Photon. 5 1742-8 · DOI
  129. Wu P C, Pala R A, Kafaie Shirmanesh G, Cheng W-H, Sokhoyan R, Grajower M, Alam M Z, Lee D and Atwater H A 2019 Dynamic beam steering with all-dielectric electro-optic III-V multiple-quantum-well metasurfaces Nat. Commun. 10 3654 · DOI
  130. Roy T, Zhang S, Jung I W, Troccoli M, Capasso F and Lopez D 2018 Dynamic metasurface lens based on MEMS technology APL Photon. 3 021302 · DOI
  131. Shi C, Luxmoore I J and Nash G R 2019 Gate tunable graphene-integrated metasurface modulator for mid-infrared beam steering Opt. Express 27 14577-84 · DOI
  132. Kobashi J, Yoshida H and Ozaki M 2016 Planar optics with patterned chiral liquid crystals Nat. Photon. 10 389-92 · DOI
  133. Liu H, Yang H, Li Y, Song B, Wang Y, Liu Z, Peng L, Lim H, Yoon J and Wu W 2019 Switchable all-dielectric metasurfaces for full-color reflective display Adv. Opt. Mater. 7 1801639 · DOI
  134. Lee G-Y, Hong J-Y, Hwang S, Moon S, Kang H, Jeon S, Kim H, Jeong J-H and Lee B 2018 Metasurface eyepiece for augmented reality Nat. Commun. 9 4562 · DOI
  135. Kim I, Yoon G, Jang J, Genevet P, Nam K T and Rho J 2018 Outfitting next generation displays with optical metasurfaces ACS Photon. 5 3876-95 · DOI
  136. Checcucci S, Bottein T, Gurioli M, Favre L, Grosso D and Abbarchi M 2019 Multifunctional metasurfaces based on direct nanoimprint of titania sol-gel coatings Adv. Opt. Mater. 7 1801406 · DOI
  137. Li L, Bai Y, Li L, Wang S and Zhang T 2017 A Superhydrophobic smart coating for flexible and wearable sensing electronics Adv. Mater. 29 1702517 · DOI
  138. Wang W, Xu L, Li X, Lin Z, Yang Y and An E 2014 Self-healing mechanisms of water triggered smart coating in seawater J. Mater. Chem. A 2 1914-21 · DOI
  139. Huang L, Chen X, Bai B, Tan Q, Jin G, Zentgraf T and Zhang S 2013 Helicity dependent directional surface plasmon polariton excitation using a metasurface with interfacial phase discontinuity Light Sci. Appl. 2 e70-e70 · DOI · Paper page
  140. Jin J, Luo J, Zhang X, Gao H, Li X, Pu M, Gao P, Zhao Z and Luo X 2016 Generation and detection of orbital angular momentum via metasurface Sci. Rep. 6 24286 · DOI
  141. Oshita M, Takahashi H, Ajiki Y and Kan T 2020 Reconfigurable surface plasmon resonance photodetector with a MEMS deformable cantilever ACS Photon. 7 673-9 · DOI
  142. Liu X and Padilla W J 2016 Thermochromic infrared metamaterials Adv. Mater. 28 871-5 · DOI
  143. Park Y et al 2017 Metasurface electrode light emitting diodes with planar light control Sci. Rep. 7 14753 · DOI
  144. Zhou L, Ou Q-D, Shen S, Zhou Y, Fan -Y-Y, Zhang J and Tang J-X 2016 Tailoring directive gain for high-contrast, wide-viewing-angle organic light-emitting diodes using speckle image holograpy metasurfaces ACS Appl. Mater. Interfaces 8 22402-9 · DOI
  145. Brière G, Ni P, Héron S, Chenot S, Vézian S, Brändli V, Damilano B, Duboz J-Y, Iwanaga M and Genevet P 2019 An etching-free approach toward large-scale light-emitting metasurfaces Adv. Opt. Mater. 7 1801271 · DOI
  146. Aleksandr V, Radoslaw K, Koenderink A F and Isabelle S 2019 Light-emitting metasurfaces Nanophotonics 8 1151-98 · DOI
  147. Manjappa M, Pitchappa P, Singh N, Wang N, Zheludev N I, Lee C and Singh R 2018 Reconfigurable MEMS Fano metasurfaces with multiple-input-output states for logic operations at terahertz frequencies Nat. Commun. 9 4056 · DOI
  148. Xu L H, Ou Q-D, Li Y-Q, Zhang Y-B, Zhao X-D, Xiang H-Y, Chen J-D, Zhou L, Lee S-T and Tang J-X 2016 Microcavity-free broadband light outcoupling enhancement in flexible organic light-emitting diodes with nanostructured transparent metal-dielectric composite electrodes ACS Nano 10 1625-32 · DOI
  149. Vieu C, Carcenac F, Pépin A, Chen Y, Mejias M, Lebib A, Manin-Ferlazzo L, Couraud L and Launois H 2000 Electron beam lithography: resolution limits and applications Appl. Surf. Sci. 164 111-7 · DOI
  150. Tseng A A, Kuan C, Chen C D and Ma K J 2003 Electron beam lithography in nanoscale fabrication: recent development IEEE. Trans. Compon. Packaging. Manuf. Technol. 26 141-9 · DOI
  151. Reyntjens S and Puers R 2001 A review of focused ion beam applications in microsystem technology J. Micromech. Microeng. 11 287-300 · DOI
  152. Gao W, Singh N, Song L, Liu Z, Reddy A L M, Ci L, Vajtai R, Zhang Q, Wei B and Ajayan P M 2011 Direct laser writing of micro-supercapacitors on hydrated graphite oxide films Nat. Nanotechnol. 6 496-500 · DOI
  153. Zang Z, Zeng X, Du J, Wang M and Tang X 2016 Femtosecond laser direct writing of microholes on roughened ZnO for output power enhancement of InGaN light-emitting diodes Opt. Lett. 41 3463-6 · DOI
  154. Garstecki P, Fuerstman M J, Stone H A and Whitesides G M 2006 Formation of droplets and bubbles in a microfluidic T-junction-scaling and mechanism of break-up Lab Chip 6 437-46 · DOI
  155. Nisisako T, Torii T and Higuchi T 2002 Droplet formation in a microchannel network Lab Chip 2 24-26 · DOI
  156. Khodasevych I E, Shah C M, Sriram S, Bhaskaran M, Withayachumnankul W, Ung B S Y, Lin H, Rowe W S T, Abbott D and Mitchell A 2012 Elastomeric silicone substrates for terahertz fishnet metamaterials Appl. Phys. Lett. 100 061101 · DOI
  157. Lötters J C, Olthuis W, Veltink P H and Bergveld P 1997 The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications J. Micromech. Microeng. 7 145-7 · DOI
  158. Lorenz H, Despont M, Fahrni N, LaBianca N, Renaud P and Vettiger P 1997 SU-8: a low-cost negative resist for MEMS J. Micromech. Microeng. 7 121-4 · DOI
  159. Arscott S, Garet F, Mounaix P, Duvillaret L, Coutaz J and Lippens D 1999 Terahertz time-domain spectroscopy of films fabricated from SU-8 Electron. Lett. 35 243-4 · DOI
  160. Babaei Gavan K, Westra H J R, van der Drift E W J M, Venstra W J and van der Zant H S J 2009 Size-dependent effective Young's modulus of silicon nitride cantilevers Appl. Phys. Lett. 94 233108 · DOI
  161. Reeves J B, Jayne R K, Stark T J, Barrett L K, White A E and Bishop D J 2018 Tunable infrared metasurface on a soft polymer scaffold Nano Lett. 18 2802-6 · DOI

Cited by

Sorted by citations

Authors
Guanxing, Z., Liu, Z., Deng, W., & Zhu, W.
Affiliations
University of Electronic Science and Technology of China (CN)
Corresponding author
Zhu, Weiming
Venue
Journal of Optics
Published
2020-12-11
Volume
23
Issue
1
Pages
013001
ISSN
  • 0150-536X (ISSN-L)
  • 2040-8978
  • 2040-8986
OpenAlex
W3108257266
Cited by
34
References
3
Citations by year
2026: 5 · 2025: 6 · 2024: 4 · 2023: 7 · 2022: 9 · 2021: 3
FWCI
3.27
Type
journal article
Language
en
Open access
Locations
Journal of Optics (publishedVersion, cc-by)
Funders
National Natural Science Foundation of China (61801100)
Topics
  • Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
  • Physical Sciences › Engineering › Aerospace Engineering › Advanced Antenna and Metasurface Technologies
  • Physical Sciences › Engineering › Mechanical Engineering › Advanced Materials and Mechanics
Keywords
reconfigurable metasurface, mechanical actuation, flexible photonics, tunable photonic devices, MEMS actuation, droplet arrays, microfluidics, flexible substrates, reconfigurable photonic devices

About these checks

Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.

Statistics and arithmetic are recomputed, not judged.

Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.

What counts as a claim ›How we measure confidence ›How we check this ›

Are you an author, or do you see a problem with this page? Request a review