Cited by 143Superconducting and THz Device TechnologyQuantum Information and CryptographySuperconducting Materials and Applications

The DOI matches its Crossref record; 22 of the 22 references it cites were found in a registry or an index.

Qubit compatible superconducting interconnects

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Abstract

We present a fabrication process for fully superconducting interconnects compatible with superconducting qubit technology. These interconnects allow for the three dimensional integration of quantum circuits without introducing lossy amorphous dielectrics. They are composed of indium bumps several microns tall separated from an aluminum base layer by titanium nitride which serves as a diffusion barrier. We measure the whole structure to be superconducting (transition temperature of 1.1 K), limited by the aluminum. These interconnects have an average critical current of 26.8 mA, and mechanical shear and thermal cycle testing indicate that these devices are mechanically robust. Our process provides a method that reliably yields superconducting interconnects suitable for use with superconducting qubits.

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Crossref · 10.1088/2058-9565/aa94fc

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Research works printed but not linked: 2

  1. McRae C R H, 2017, 111, 12
  2. Wade K, 1973, The Chemistry of Aluminium, Gallium, Indium and Thallium

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Items 101–143 of 143

Metadata

Authors
Foxen, B., Mutus, J. Y., Lucero, E., Graff, R., Megrant, A., Chen, Y., Quintana, C., Burkett, B., Kelly, J., Jeffrey, E., Yang, Y., Yu, A., Arya, K., Barends, R., Chen, Z., Chiaro, B., Dunsworth, A., Fowler, A., Gidney, C., Giustina, M., Huang, T., Klimov, P., Neeley, M., Neill, C., Roushan, P., Sank, D., Vainsencher, A., Wenner, J., White, T. C., & Martinis, J. M.
Affiliations
  • University of California, Santa Barbara (US)
  • Google (United States) (US)
Corresponding author
Martinis, John M
Venue
Quantum Science and Technology
Published
2017-11-29
Volume
3
Issue
1
Pages
014005
ISSN
2058-9565 (ISSN-L)
OpenAlex
W2748822299
Cited by
143
References
22
Citations by year
2026: 8 · 2025: 10 · 2024: 27 · 2023: 22 · 2022: 17 · 2021: 21 · 2020: 14 · 2019: 10 · 2018: 11 · 2017: 3
FWCI
5.69
Type
journal article
Language
en
Open access
Locations
  • Quantum Science and Technology (publishedVersion, cc-by)
  • arXiv (Cornell University) (submittedVersion)
  • arXiv (Cornell University)
Funders
  • Division of Graduate Education (DGE- 1144085)
  • Google (JMGI01)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Superconducting and THz Device Technology
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Quantum Information and Cryptography
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Superconducting Materials and Applications
Keywords
superconducting interconnects, superconducting qubits, indium bumps, critical current, mechanical robustness, thermal cycling, fabrication techniques

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