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Silica-based single-mode waveguides on silicon and their application to guided-wave optical interferometers
Abstract
Low-loss silica-based single-mode waveguides and directional couplers are fabricated on silicon substrates. Their application to Mach-Zehnder interferometer type guided-wave devices is demonstrated. Optical switches or tunable optical couplers are fabricated using the thermooptic effect. Asymmetrical Mach-Zehnder interferometers are successfully applied to multi/demultiplexers for optical FDM transmission systems.>
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Citations
Cited by
Silica waveguides on silicon and their application to integrated-optic components
Kawachi, M. (1990) · Optical and Quantum Electronics · doi:10.1007/bf02113964 · Cited by 520
Self-citationAn N*N optical multiplexer using a planar arrangement of two star couplers
Dragone, C. (1991) · IEEE Photonics Technology Letters · doi:10.1109/68.84502 · Cited by 494
Integrated optics N*N multiplexer on silicon
Dragone, C., Edwards, C. A., & Kistler, R. C. (1991) · IEEE Photonics Technology Letters · doi:10.1109/68.93254 · Cited by 262
Sun, D., Sun, Q., Xing, W., Sun, Z., Shang, H., Chang, L., Wang, X., Liu, P., & Hall, T. (2018) · AIP Advances · doi:10.1063/1.5045516 · Cited by 7
Stress Evaluation of Chemical Vapor Deposited Silicon Dioxide Films
Maeda, M., & Itsumi, M. (2002) · Physica B: Condensed Matter · doi:10.1016/s0921-4526(02)01291-7 · Cited by 3
Metadata
- Authors
- Takato, N., Jinguji, K., Yasu, M., Toba, H., & Kawachi, M.
- Venue
- Journal of Lightwave Technology
- Published
- 1988-06
- Volume
- 6
- Issue
- 6
- Pages
- 1003-1010
- ISSN
- 0733-8724 (ISSN-L)
- OpenAlex
- W2152876601
- Cited by
- 233
- References
- 0
- FWCI
- 19.33
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Silica-based single-mode waveguides on silicon and their application to guided-wave optical interferometers. https://app.cochat.ai/papers/10.1109/50.4091
- The paper
- Takato, N., Jinguji, K., Yasu, M., Toba, H., & Kawachi, M. (1988). Silica-based single-mode waveguides on silicon and their application to guided-wave optical interferometers. Journal of Lightwave Technology. https://doi.org/10.1109/50.4091
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
