The DOI matches its Crossref record; 15 of the 15 references it cites were found in a registry or an index.
{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties
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Citations
Cites
Ferroelectric thin films for micro-sensors and actuators: a review
Muralt, P. (2000) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/10/2/307 · Cited by 934
Self-citationThermodynamic theory of the lead zirconate-titanate solid solution system, part I: Phenomenology
Haun, M. J., Furman, E., Jang, S. J., & Cross, L. E. (1989) · Ferroelectrics · doi:10.1080/00150198908221436 · Cited by 459
Du, X.-H., Zheng, J., Belegundu, U., & Uchino, K. (1998) · Applied Physics Letters · doi:10.1063/1.121373 · Cited by 441
PZT thin films for microsensors and actuators: Where do we stand?
Muralt, P. (2000) · IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control · doi:10.1109/58.852073 · Cited by 375
Self-citationHaun, M. J., Zhuang, Z. Q., Furman, E., Jang, S. J., & Cross, L. E. (1989) · Ferroelectrics · doi:10.1080/00150198908221438 · Cited by 289
Texture control of PbTiO3 and Pb(Zr,Ti)O3 thin films with TiO2 seeding
Muralt, P., Maeder, T., Sagalowicz, L., Hiboux, S., Scalese, S., Naumovic, D., Agostino, R. G., Xanthopoulos, N., Mathieu, H. J., Patthey, L., et al. (1998) · Journal of Applied Physics · doi:10.1063/1.366614 · Cited by 271
Self-citationHaun, M. J., Furman, E., Jang, S. J., & Cross, L. E. (1989) · Ferroelectrics · doi:10.1080/00150198908221440 · Cited by 268
Micromachined high frequency ferroelectric sonar transducers
Bernstein, J. J., Finberg, S. L., Houston, K., Niles, L. C., Chen, H. D., Cross, L. E., Li, K. K., & Udayakumar, K. (1997) · IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control · doi:10.1109/58.655620 · Cited by 261
Piezoelectric micromotors for microrobots
Flynn, A. M., Tavrow, L. S., Bart, S. F., Brooks, R. A., Ehrlich, D. J., Udayakumar, K. R., & Cross, L. E. (1992) · Journal of Microelectromechanical Systems · doi:10.1109/84.128055 · Cited by 228
Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditions
Muralt, P., Kholkin, A. L., Köhli, M. O., et al. (1996) · Sensors and Actuators A Physical · doi:10.1016/0924-4247(96)01139-9 · Cited by 196
Self-citation
Cited by
Ferroelectric thin films: Review of materials, properties, and applications
Setter, N., Damjanovic, D., Eng, L., Fox, G., Gevorgian, S., Hong, S., Kingon, A., Kohlstedt, H., Park, N. Y., Stephenson, G. B., et al. (2006) · Journal of Applied Physics · doi:10.1063/1.2336999 · Cited by 1,907
Self-citationRecent Progress in Materials Issues for Piezoelectric MEMS
Muralt, P. (2008) · Journal of the American Ceramic Society · doi:10.1111/j.1551-2916.2008.02421.x · Cited by 332
Self-citationPiezoelectric MEMS for energy harvesting
Kim, S.-G., Priya, S., & Kanno, I. (2012) · MRS Bulletin · doi:10.1557/mrs.2012.275 · Cited by 320
Organic Thin Film Transistors in Mechanical Sensors
Lamport, Z. A., Cavallari, M. R., Kam, K. A., McGinn, C. K., Yu, C., & Kymissis, I. (2020) · Advanced Functional Materials · doi:10.1002/adfm.202004700 · Cited by 40
Haavik, C., & Rørvik, P. M. (2013) · Chemical Solution Deposition of Functional Oxide Thin Films · doi:10.1007/978-3-211-99311-8_25 · Cited by 2
Metadata
- Authors
- Ledermann, N., Muralt, P., Baborowski, J., Gentil, S., Mukati, K., Cantoni, M., Seifert, A., & Setter, N.
- Venue
- Sensors and Actuators A: Physical
- Publisher
- Elsevier BV
- Published
- 2003-07
- Volume
- 105
- Issue
- 2
- Pages
- 162-170
- ISSN
- 0924-4247 (ISSN-L)
- OpenAlex
- W1967110057
- Cited by
- 395
- References
- 15
- FWCI
- 12.29
- Type
- journal article
- Language
- en
- Open access
- green
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- CoChat. (2026). Citation check: {1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties. https://app.cochat.ai/papers/10.1016/s0924-4247(03)00090-6
- The paper
- Ledermann, N., Muralt, P., Baborowski, J., Gentil, S., Mukati, K., Cantoni, M., Seifert, A., & Setter, N. (2003). {1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties. Sensors and Actuators A: Physical. https://doi.org/10.1016/s0924-4247(03)00090-6
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
