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Cited by 217

The DOI matches its Crossref record; 2 of the 2 references it cites were found in a registry or an index.

Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication

Maruo, S., Kawata, S.·1998·Journal of Microelectromechanical Systems

Abstract

We present three-dimensional (3-D) microstructures fabricated from photopolymerizable resin with a resolution of 0.62 /spl mu/m. The method used to fabricate such small structures has been developed using a femto-second-pulsed near-infrared (IR) laser. Structures such as microcoils and microtubes are presented which demonstrate the effectiveness of our method. In this method, a two-photon absorption process is successfully utilized to confine the solidification of photopolymerizable resin to the focused spot of the laser, which is possible due to the quadratic dependence of the two-photon absorption rate on light intensity. The experimental system, experimental conditions, and related issues for this novel method of photopolymerization are also discussed.

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Metadata

Authors
Maruo, S., & Kawata, S.
Venue
Journal of Microelectromechanical Systems
Published
1998
Volume
7
Issue
4
Pages
411-415
ISSN
1057-7157 (ISSN-L)
OpenAlex
W2113417865
Cited by
217
References
2
FWCI
5.07
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication. https://app.cochat.ai/papers/10.1109/84.735349
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Maruo, S., & Kawata, S. (1998). Two-photon-absorbed near-infrared photopolymerization for three-dimensional microfabrication. Journal of Microelectromechanical Systems. https://doi.org/10.1109/84.735349

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.