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Generalized guide for MOSFET miniaturization
Abstract
As MOSFET dimensions are reduced, lower voltages, shallower junctions, thinner oxides, and heavier doping help to maintain long-channel behavior. A simple, empirical relation has been found between these parameters and the minimum channel length for which long-channel subthreshold behavior will be observed. This approximate relation provides an estimate for MOSFET parameters not requiring reduction of all dimensions by the same scale factor.
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Citations
Cited by
Scaling the Si MOSFET: from bulk to SOI to bulk
Yan, R.-H., Ourmazd, A., & Lee, K. F. (1992) · IEEE Transactions on Electron Devices · doi:10.1109/16.141237 · Cited by 910
A functional MOS transistor featuring gate-level weighted sum and threshold operations
Shibata, T., & Ohmi, T. (1992) · IEEE Transactions on Electron Devices · doi:10.1109/16.137325 · Cited by 615
EGFET-Based Sensors for Bioanalytical Applications: A Review
Pullano, S. A., Critello, C. D., Mahbub, I., Tasneem, N. T., Shamsir, S., Islam, S. K., Greco, M., & Fiorillo, A. S. (2018) · Sensors · doi:10.3390/s18114042 · Cited by 197
Metadata
- Authors
- Brews, J. R., Fichtner, W., Nicollian, E. H., & Sze, S. M.
- Venue
- IEEE Electron Device Letters
- Published
- 1980-01
- Volume
- 1
- Issue
- 1
- Pages
- 2-4
- ISSN
- 0741-3106 (ISSN-L)
- OpenAlex
- W2099478375
- Cited by
- 356
- References
- 0
- FWCI
- 21.21
- Type
- journal article
- Language
- en
- Open access
- closed
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How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
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- CoChat. (2026). Citation check: Generalized guide for MOSFET miniaturization. https://app.cochat.ai/papers/10.1109/edl.1980.25205
- The paper
- Brews, J. R., Fichtner, W., Nicollian, E. H., & Sze, S. M. (1980). Generalized guide for MOSFET miniaturization. IEEE Electron Device Letters. https://doi.org/10.1109/edl.1980.25205
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Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
