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Multi-layer cross-point binary oxide resistive memory (OxRRAM) for post-NAND storage application

Baek, I.G., Kim, D.C., Lee, M.J., Kim, H.-J., Yim, E.K., Lee, M.S., Lee, J.E., Ahn, S.E., Seo, S., Lee, J.H., Park, J.C., Cha, Y.K., Park, S.O., Kim, H.S., Yoo, I.K., Chung, U., Moon, J.T., Ryu, B.I.·2006·IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.

Abstract

Feasibility of the multi-layer cross-point structured binary oxide resistive memory (OxRRAM) has been tested for next generation non-volatile random access high density data storage application. Novel plug contact type bottom electrode (plug-BE) could reduce active memory cell diameter down to 50nm with smaller operation current and improved switching distributions. With 2 additional masks, one layer of plug-BE included cross-point memory array could be added on top of another one. No signal of inter-layer interference has been observed. Also, prototype binary oxide based diodes have been fabricated for the purpose of suppressing intra-layer interference of cross-point memory array

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Metadata

Authors
Baek, I. G., Kim, D. C., Lee, M. J., Kim, H.-J., Yim, E. K., Lee, M. S., Lee, J. E., Ahn, S. E., Seo, S., Lee, J. H., Park, J. C., Cha, Y. K., Park, S. O., Kim, H. S., Yoo, I. K., Chung, U., Moon, J. T., & Ryu, B. I.
Venue
IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.
Publisher
IEEE
Published
2006-04-07
Pages
750-753
OpenAlex
W2543446546
Cited by
218
References
0
FWCI
19.11
Type
conference paper
Language
en
Open access
closed

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Baek, I. G., Kim, D. C., Lee, M. J., Kim, H.-J., Yim, E. K., Lee, M. S., Lee, J. E., Ahn, S. E., Seo, S., Lee, J. H., Park, J. C., Cha, Y. K., Park, S. O., Kim, H. S., Yoo, I. K., Chung, U., Moon, J. T., & Ryu, B. I. (2006). Multi-layer cross-point binary oxide resistive memory (OxRRAM) for post-NAND storage application. IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. https://doi.org/10.1109/iedm.2005.1609462

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.