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A microfabricated suspended-tube chemical reactor for thermally efficient fuel processing
Abstract
We present a suspended-tube chemical reactor/heat exchanger for high-temperature fuel processing in micro energy conversion systems, primarily for hydrogen production in portable fuel cell systems. This reactor, designed to thermally isolate a high-temperature reaction zone, consists of four free-standing silicon nitride tubes comprising two independent U-shaped fluidic channels. Portions of the tubes are encased in silicon to enable heat exchange between the fluids in these channels. A thin-film platinum resistor is embedded for localized heating and temperature sensing. This paper describes the design and fabrication process for the MEMS fuel processor. Fluidic testing, thermal characterization up to 825°C, and preparation of catalyst washcoats in the reactor microchannels are discussed. In addition, results from catalytic autothermal butane combustion and ammonia cracking in the reactor are presented.
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Citations
Cites
Thermal Conductivity of Silicon and Germanium from 3°K to the Melting Point
Glassbrenner, C. J., & Slack, G. A. (1964) · Physical Review · doi:10.1103/physrev.134.a1058 · Cited by 1,652
Cited by
Review of the Decomposition of Ammonia to Generate Hydrogen
Lucentini, I., Garcia, X., Vendrell, X., & Llorca, J. (2021) · Industrial & Engineering Chemistry Research · doi:10.1021/acs.iecr.1c00843 · Cited by 687
Synthesis of Silver Nanoparticles in a Continuous Flow Tubular Microreactor
Lin, X. Z., Terepka, A. D., & Yang, H. (2004) · Nano Letters · doi:10.1021/nl0485859 · Cited by 272
Metadata
- Authors
- Arana, L. R., Schaevitz, S. B., Franz, A. J., Schmidt, M. A., & Jensen, K. F.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2003-10
- Volume
- 12
- Issue
- 5
- Pages
- 600-612
- ISSN
- 1057-7157 (ISSN-L)
- OpenAlex
- W2170310298
- Cited by
- 165
- References
- 1
- FWCI
- 13.07
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: A microfabricated suspended-tube chemical reactor for thermally efficient fuel processing. https://app.cochat.ai/papers/10.1109/jmems.2003.817897
- The paper
- Arana, L. R., Schaevitz, S. B., Franz, A. J., Schmidt, M. A., & Jensen, K. F. (2003). A microfabricated suspended-tube chemical reactor for thermally efficient fuel processing. Journal of Microelectromechanical Systems. https://doi.org/10.1109/jmems.2003.817897
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
