Microsensor Integration Into Systems-on-Chip

Brand, O.

doi:10.1109/jproc.2006.873618

Cited by 106Advanced MEMS and NEMS TechnologiesAnalog and Mixed-Signal Circuit DesignMicrofluidic and Capillary Electrophoresis Applications

Microsensor Integration Into Systems-on-Chip

Brand, O.·2006·Proceedings of the IEEE

DOI 10.1109/jproc.2006.873618

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Abstract

Sensing systems-on-chip (SSoCs), combining micromachined sensing structures and microelectronic building blocks on a single chip, are reviewed. While single-chip pressure and inertial sensing systems have been commercially available for more than a decade, the recent expansion of SSoC into new application areas, ranging from chemical and biochemical sensing to atomic force microscopy, demonstrates the full potential of this microsensor integration approach. Available fabrication processes for integrated sensing systems are summarized, categorizing them into pre-, intra-, and post-CMOS approaches depending on the way the micromachining module is merged with the integrated circuit (IC) technology. Examples of SSoCs are presented to highlight the different integration options, ranging from cointegration of micromachined sensors with purely analog signal chains to microsystems with cointegrated digital signal processors and digital interfaces.

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Advances in wearable biochemical sensors have been slow, but research has recently picked up pace due to the development of micro and nano fabrication technologies.
“Advances in the field of wearable biochemical sensors has been slow, but research has recently picked up pace due to the development of micro and nano fabrication technologies [12].”
From A review of wearable sensors and systems with application in rehabilitation (2012) · cites this paper as [12]

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A review of wearable sensors and systems with application in rehabilitation
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Authors: Brand, O.
Affiliations: Georgia Institute of Technology (US)
Corresponding author: Brand, O.
ORCID: Brand, O.
Venue: Proceedings of the IEEE
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Published: 2006-06
Volume: 94
Issue: 6
Pages: 1160-1176
ISSN: 0018-9219 (ISSN-L)
1558-2256
DOI: 10.1109/jproc.2006.873618
OpenAlex: W2006903672
Cited by: 106
References: 81
Citations by year: 2024: 1 · 2023: 2 · 2022: 6 · 2021: 4 · 2020: 6 · 2019: 1 · 2018: 3 · 2017: 6 · 2016: 5 · 2015: 7 · 2014: 6 · 2013: 9 · 2012: 6
FWCI: 8.43
Type: journal article
Language: en
Open access: closed
Licence: ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html (vor)
Locations: Proceedings of the IEEE (publishedVersion)
SMARTech Repository (Georgia Institute of Technology) (submittedVersion)
Topics: Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
Physical Sciences › Engineering › Biomedical Engineering › Analog and Mixed-Signal Circuit Design
Physical Sciences › Engineering › Biomedical Engineering › Microfluidic and Capillary Electrophoresis Applications
Keywords: system-on-chip, micromachining, pressure sensors, inertial sensors, chemical sensing, biochemical sensing, atomic force microscopy, CMOS integration, cointegration, digital signal processing, microsystems

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Microsensor Integration Into Systems-on-Chip

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