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Analysis of NBTI Degradation- and Recovery-Behavior Based on Ultra Fast VT-Measurements
Abstract
We present a new direct VTmeasurement technique with arbitrary choice of drain voltage and a mus delay (factor of 1000 improvement) after stress. As shown this technique enables a meaningful comparison of data to theory (e.g. DeltaVTmeasurable as response to stress times from 100mus over 10 decades in time and an analysis of recovery over 11 decades in time) which may lead to a better understanding of NBTI. A fast precursor due to bulk trapping was found to significantly influence degradation slopes for all times. Based on a physical model - standard reaction/diffusion model plus fast bulk trapping -with just 3 fit parameters experimental degradation can be well modelled and degradation slopesfrac14 (both reported in literature) can be explained. A lifetime extrapolation based on this physical model is superior to the common straight line fit. There is no satisfying agreement of recovery data with reaction/diffusion theory. Further experimental and theoretical work is going to be needed
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Cited by
Stochastic charge trapping in oxides: From random telegraph noise to bias temperature instabilities
Grasser, T. (2012) · Microelectronics Reliability · doi:10.1016/j.microrel.2011.09.002 · Cited by 554
Understanding BTI in SiC MOSFETs and Its Impact on Circuit Operation
Puschkarsky, K., Reisinger, H., Aichinger, T., Gustin, W., & Grasser, T. (2018) · IEEE Transactions on Device and Materials Reliability · doi:10.1109/tdmr.2018.2813063 · Cited by 115
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Metadata
- Authors
- Reisinger, H., Blank, O., Heinrigs, W., Muhlhoff, A., Gustin, W., & Schlunder, C.
- Venue
- 2006 IEEE International Reliability Physics Symposium Proceedings
- Publisher
- IEEE
- Published
- 2006
- Pages
- 448-453
- ISSN
- 0735-0791 (ISSN-L)
- OpenAlex
- W2114648586
- Cited by
- 279
- References
- 0
- FWCI
- 41.93
- Type
- conference paper
- Language
- en
- Open access
- closed
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- Reisinger, H., Blank, O., Heinrigs, W., Muhlhoff, A., Gustin, W., & Schlunder, C. (2006). Analysis of NBTI Degradation- and Recovery-Behavior Based on Ultra Fast VT-Measurements. 2006 IEEE International Reliability Physics Symposium Proceedings. https://doi.org/10.1109/relphy.2006.251260
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