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Temperature measurements of semiconductor devices - a review

Blackburn, D.L.·2004·Twentieth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (IEEE Cat. No.04CH37545)

Abstract

There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories: electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed, and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.

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Metadata

Authors
Blackburn, D. L.
Venue
Twentieth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (IEEE Cat. No.04CH37545)
Publisher
IEEE
Published
2004-05-06
Pages
70-80
OpenAlex
W2109894155
Cited by
319
References
2
FWCI
8.28
Type
conference paper
Language
en
Open access
closed

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CoChat. (2026). Citation check: Temperature measurements of semiconductor devices - a review. https://app.cochat.ai/papers/10.1109/stherm.2004.1291304
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Blackburn, D. L. (2004). Temperature measurements of semiconductor devices - a review. Twentieth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (IEEE Cat. No.04CH37545). https://doi.org/10.1109/stherm.2004.1291304

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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).

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