The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
A gas chromatographic air analyzer fabricated on a silicon wafer
Abstract
A miniature gas analysis system has been built based on the principles of gas chromatography (GC). The major components are fabricated in silicon using photolithography and chemical etching techniques, which allows size reductions of nearly three orders of magnitude compared to conventional laboratory instruments. The chromatography system consists of a sample injection valve and a 1.5-m-long separating capillary column, which are fabricated on a substrate silicon wafer. The output thermal conductivity detector is separately batch fabricated and integrably mounted on the substrate wafer. The theory of gas chromatography has been used to optimize the performance of the sensor so that separations of gaseous hydrocarbon mixtures are performed in less than 10 s. The system is expected to find application in the areas of portable ambient air quality monitors, implanted biological experiments, and planetary probes.
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Cites
Field Assisted Glass-Metal Sealing
Wallis, G., & Pomerantz, D. I. (1969) · Journal of Applied Physics · doi:10.1063/1.1657121 · Cited by 746
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McDonald, J. C., Duffy, D. C., Anderson, J. R., Chiu, D. T., Wu, H., Schueller, O. J. A., & Whitesides, G. M. (2000) · Electrophoresis · doi:10.1002/(sici)1522-2683(20000101)21:1<27::aid-elps27>3.0.co;2-c · Cited by 3,329
Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications
Mark, D., Haeberle, S., Roth, G., von Stetten, F., & Zengerle, R. (2010) · Chemical Society Reviews · doi:10.1039/b820557b · Cited by 1,647
Microfabricating Conjugated Polymer Actuators
Jager, E. W. H., Smela, E., & Inganäs, O. (2000) · Science · doi:10.1126/science.290.5496.1540 · Cited by 962
Abgrall, P., & Gué, A.-M. (2007) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/17/5/r01 · Cited by 561
Gupta, V., Beirne, S., Nesterenko, P. N., & Paull, B. (2018) · Analytical Chemistry · doi:10.1021/acs.analchem.7b03778 · Cited by 56
Metadata
- Authors
- Terry, S. C., Jerman, J. H., & Angell, J. B.
- Venue
- IEEE Transactions on Electron Devices
- Published
- 1979-12
- Volume
- 26
- Issue
- 12
- Pages
- 1880-1886
- ISSN
- 0018-9383 (ISSN-L)
- 1557-9646
- OpenAlex
- W2139712155
- Cited by
- 1,452
- References
- 1
- FWCI
- 0.59
- Type
- journal article
- Language
- en
- Open access
- closed
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- Terry, S. C., Jerman, J. H., & Angell, J. B. (1979). A gas chromatographic air analyzer fabricated on a silicon wafer. IEEE Transactions on Electron Devices. https://doi.org/10.1109/t-ed.1979.19791
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
