The DOI matches its Crossref record; 9 of the 9 references it cites were found in a registry or an index.
Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors
Abstract
In this paper the differential equations governing thin, square-diaphragm silicon pressure sensors are developed and solved using finite-difference numerical methods. Diaphragm deflection and stress patterns are presented in a normalized form applicable to diaphragms of arbitrary thickness and size. For 1-mm210-µm-thick diaphragms in
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Citations
Cites
Timoshenko, S. P., & Woinowsky-Krieger, S. (1959) · UCLA Biblioteca de Ingenieria Civil · Cited by 12,112
Foundations of solid mechanics
Pohle, F. V. (1966) · Journal of the Franklin Institute · doi:10.1016/0016-0032(66)90243-2 · Cited by 1,950
Transport Properties of a Many-Valley Semiconductor
Herring, C. (1955) · Bell System Technical Journal · doi:10.1002/j.1538-7305.1955.tb01472.x · Cited by 544
Formulas for stress and strain
Roark, R. J. (1965) · CERN Document Server (European Organization for Nuclear Research) · Cited by 328
Silicon Diffused-Element Piezoresistive Diaphragms
Tufte, O. N., Chapman, P. W., & Long, D. (1962) · Journal of Applied Physics · doi:10.1063/1.1931164 · Cited by 267
An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation
Samaun, Wise, K. D., & Angell, J. B. (1973) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1973.324170 · Cited by 158
Self-citationNoyce, R. N. (1977) · Scientific American · doi:10.1038/scientificamerican0977-62 · Cited by 123
A Microminiature Solid-State Capacitive Blood Pressure Transducer with Improved Sensitivity
Frobenius, W. D., Sanderson, A., & Nathanson, H. C. (1973) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1973.324204 · Cited by 29
Sadd, M. H. (2014) · Elsevier eBooks · doi:10.1016/b978-0-12-408136-9.00011-8 · Cited by 4
Cited by
A Path Beyond Metal and Silicon:Polymer/Nanomaterial Composites for Stretchable Strain Sensors
Qiu, A., Li, P., Yang, Z., Yao, Y., Lee, I., & Ma, J. (2019) · Advanced Functional Materials · doi:10.1002/adfm.201806306 · Cited by 237
Metadata
- Authors
- Clark, S. K., & Wise, K. D.
- Venue
- IEEE Transactions on Electron Devices
- Published
- 1979-12
- Volume
- 26
- Issue
- 12
- Pages
- 1887-1896
- ISSN
- 0018-9383 (ISSN-L)
- 1557-9646
- OpenAlex
- W1974978401
- Cited by
- 301
- References
- 9
- FWCI
- 3.52
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors. https://app.cochat.ai/papers/10.1109/t-ed.1979.19792
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- Clark, S. K., & Wise, K. D. (1979). Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors. IEEE Transactions on Electron Devices. https://doi.org/10.1109/t-ed.1979.19792
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
