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Cited by 15Low-Pressure Plasma Processing and DiagnosticsMagnetic confinement fusion researchDust and Plasma Wave Phenomena

The DOI matches its Crossref record.

Nonlinear effects and anomalous transport in RF plasmas

Chen, F.F.·2006·IEEE Transactions on Plasma Science
DOI 10.1109/tps.2006.874851
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Abstract

Three examples are given of experiments which give evidence of nonclassical behavior in partially ionized, low-temperature, radio-frequency plasmas: anomalous skin depth in inductively coupled plasmas, transport by fluctuations in helicon plasmas, and parametric instabilities in helicon plasmas. A variety of physics puzzles have been found in industrial plasmas, and techniques learned from high-temperature, fusion research are used to solve them. Low-temperature plasma physics is becoming a precise, challenging discipline in the field of plasmas

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Research works printed but not linked: 40

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Metadata

Authors
Chen, F. F.
Affiliations
University of California, Los Angeles (US)
Corresponding author
Chen, F.F.
Venue
IEEE Transactions on Plasma Science
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Published
2006-06
Volume
34
Issue
3
Pages
718-727
ISSN
0093-3813 (ISSN-L)
DOI
10.1109/tps.2006.874851
OpenAlex
W2114566353
Cited by
15
References
0
Citations by year
2026: 3 · 2025: 1 · 2023: 1 · 2021: 1 · 2020: 1 · 2018: 2 · 2014: 1 · 2013: 2
FWCI
0.34
Type
journal article
Language
en
Open access
closed
Licence
ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html (vor)
Locations
IEEE Transactions on Plasma Science (publishedVersion)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
  • Physical Sciences › Physics and Astronomy › Nuclear and High Energy Physics › Magnetic confinement fusion research
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Dust and Plasma Wave Phenomena
Keywords
nonlinear plasma effects, anomalous transport, RF plasma, inductively coupled plasma, helicon plasma, plasma fluctuations, parametric instability, partially ionized plasma

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