The DOI matches its Crossref record; 17 of the 17 references it cites were found in a registry or an index.
Modification of thiol-derived self-assembling monolayers by electron and x-ray irradiation: Scientific and lithographic aspects
Abstract
This article reviews recent experiments on the modification of thiol-derived self-assembling monolayers (SAMs) by electron and x-ray irradiation. Several complementary experimental techniques such as near-edge x-ray absorption fine structure spectroscopy, x-ray photoelectron spectroscopy and microscopy, and infrared reflection absorption spectroscopy were applied to gain a detailed knowledge on the nature and extent of irradiation-induced damage in these systems. The reaction of a SAM to electron and x-ray irradiation was found to be determined by the interplay of the damage/decomposition and cross-linking processes. Ways to adjust the balance between these two opposing effects by molecular engineering of the SAM constituents are demonstrated. The presented data provide the physical–chemical basis for electron-beam patterning of self-assembled monolayers to extend lithography down to the nanometer scale.
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Cites
Formation and Structure of Self-Assembled Monolayers
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Concentration-driven surface transition in the wetting of mixed alkanethiol monolayers on gold
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Self-citation
Cited by
XPS and NEXAFS studies of aliphatic and aromatic amine species on functionalized surfaces
Graf, N., Yegen, E., Gross, T., Lippitz, A., Weigel, W., Krakert, S., Terfort, A., & Unger, W. E. S. (2009) · Surface Science · doi:10.1016/j.susc.2009.07.029 · Cited by 481
Tackling orientation of metal-organic frameworks (MOFs): The quest to enhance MOF performance
Khalil, I. E., Fonseca, J., Reithofer, M. R., Eder, T., & Chin, J. M. (2023) · Coordination Chemistry Reviews · doi:10.1016/j.ccr.2023.215043 · Cited by 396
Chen, J.-K., & Chang, C.-J. (2014) · Materials · doi:10.3390/ma7020805 · Cited by 193
Metadata
- Authors
- Zharnikov, M., & Grunze, M.
- Venue
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Publisher
- American Vacuum Society
- Published
- 2002-09-01
- Volume
- 20
- Issue
- 5
- Pages
- 1793-1807
- ISSN
- 1071-1023 (ISSN-L)
- 1520-8567
- OpenAlex
- W2088253222
- Cited by
- 262
- References
- 17
- FWCI
- 16.83
- Type
- journal article
- Language
- en
- Open access
- closed
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- Zharnikov, M., & Grunze, M. (2002). Modification of thiol-derived self-assembling monolayers by electron and x-ray irradiation: Scientific and lithographic aspects. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. https://doi.org/10.1116/1.1514665
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