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Determination of pore size distribution in thin films by ellipsometric porosimetry
Abstract
We show that ellipsometric porosimetry can be used for the measurement of the pore size distribution in thin porous films deposited on top of any smooth solid substrate. In this method, in situ ellipsometry is used to determine the amount of adsorptive, which is adsorbed/condensed in the film. Changes in refractive index and film thickness are used to calculate the quantity of adsorptive present in the film. Room temperature porosimetry based on adsorption of vapor of organic solvents has been developed. In this article, a method of calculation of pore size distribution and results of measurements on mesoporous and microporous xerogel films is discussed. Examination of the validity of the Gurvitsch rule for various organic adsorptives (toluene, heptane, and carbon tetrachloride) is carried out to assess the reliability of measurements of pore size distributions by ellipsometric porosimetry.
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Sing, K. S. W. (1985) · Pure and Applied Chemistry · doi:10.1351/pac198557040603 · Cited by 24,485
Cited by
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Maex, K., Baklanov, M. R., Shamiryan, D., lacopi, F., Brongersma, S. H., & Yanovitskaya, Z. S. (2003) · Journal of Applied Physics · doi:10.1063/1.1567460 · Cited by 1,634
Self-citationLow Dielectric Constant Materials
Volksen, W., Miller, R. D., & Dubois, G. (2010) · Chemical Reviews · doi:10.1021/cr9002819 · Cited by 964
Microstructure Analysis of Porous Lead Zirconate–Titanate Films
Atanova, A. V., Zhigalina, O. M., Khmelenin, D. N., Orlov, G. A., Seregin, D. S., Sigov, A. S., & Vorotilov, K. A. (2022) · Journal of the American Ceramic Society · doi:10.1111/jace.18064 · Cited by 15
Metadata
- Authors
- Baklanov, M. R., Mogilnikov, K. P., Polovinkin, V. G., & Dultsev, F. N.
- Venue
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
- Publisher
- American Vacuum Society
- Published
- 2000-05-01
- Volume
- 18
- Issue
- 3
- Pages
- 1385-1391
- ISSN
- 1071-1023 (ISSN-L)
- 1520-8567
- OpenAlex
- W2026219304
- Cited by
- 508
- References
- 1
- FWCI
- 9.43
- Type
- journal article
- Language
- en
- Open access
- closed
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- Baklanov, M. R., Mogilnikov, K. P., Polovinkin, V. G., & Dultsev, F. N. (2000). Determination of pore size distribution in thin films by ellipsometric porosimetry. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena. https://doi.org/10.1116/1.591390
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