The DOI matches its Crossref record; 30 of the 30 references it cites were found in a registry or an index.
Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures
Abstract
Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.
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Cites
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Cited by
Directing the self-assembly of block copolymers
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Templated Self‐Assembly of Block Copolymers: Top‐Down Helps Bottom‐Up
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Cyclic block copolymers for controlling feature sizes in block copolymer lithography
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Metadata
- Authors
- Stoykovich, M. P., Müller, M., Kim, S. O., Solak, H. H., Edwards, E. W., de Pablo, J. J., & Nealey, P. F.
- Venue
- Science
- Published
- 2005-06-03
- Volume
- 308
- Issue
- 5727
- Pages
- 1442-1446
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W2060573689
- Cited by
- 962
- References
- 30
- FWCI
- 33.05
- Type
- journal article
- Language
- en
- Open access
- closed
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- Stoykovich, M. P., Müller, M., Kim, S. O., Solak, H. H., Edwards, E. W., de Pablo, J. J., & Nealey, P. F. (2005). Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures. Science. https://doi.org/10.1126/science.1111041
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