The DOI matches its Crossref record; 28 of the 28 references it cites were found in a registry or an index.
Monolithic optical microlithography of high-density elastic circuits
Abstract
Direct optical polymer patterning: As a platform for electronic devices, polymeric materials offer the advantages of intrinsic flexibility and stretchability relative to hard material devices. However, unlike materials such as silicon, there are few tools for large-scale patterning of monolithic devices. Zheng et al. developed an optical lithography technique for the high-throughput fabrication of transistor circuitry on stretchable substrates. In this method, ultraviolet light is used to control the local solubility of the polymer, which makes it possible to fabricate transistors on the micrometer scale. These devices can be made with high yield and excellent uniformity without compromising their electronic and mechanical characteristics. Science , abh3551, this issue p. 88
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Materials and Mechanics for Stretchable Electronics
Rogers, J. A., Someya, T., & Huang, Y. (2010) · Science · doi:10.1126/science.1182383 · Cited by 5,042
Pursuing prosthetic electronic skin
Chortos, A., Liu, J., & Bao, Z. (2016) · Nature Materials · doi:10.1038/nmat4671 · Cited by 2,396
Self-citationInkjet Printing—Process and Its Applications
Singh, M., Haverinen, H. M., Dhagat, P., & Jabbour, G. E. (2010) · Advanced Materials · doi:10.1002/adma.200901141 · Cited by 2,375
Skin electronics from scalable fabrication of an intrinsically stretchable transistor array
Wang, S., Xu, J., Wang, W., Wang, G.-J. N., Rastak, R., Molina-Lopez, F., Chung, J. W., Niu, S., Feig, V. R., Lopez, J., et al. (2018) · Nature · doi:10.1038/nature25494 · Cited by 2,198
Self-citationSoft Microfluidic Assemblies of Sensors, Circuits, and Radios for the Skin
Xu, S., Zhang, Y., Jia, L., Mathewson, K. E., Jang, K.-I., Kim, J., Fu, H., Huang, X., Chava, P., Wang, R., et al. (2014) · Science · doi:10.1126/science.1250169 · Cited by 1,199
Learning the signatures of the human grasp using a scalable tactile glove
Sundaram, S., Kellnhofer, P., Li, Y., Zhu, J.-Y., Torralba, A., & Matusik, W. (2019) · Nature · doi:10.1038/s41586-019-1234-z · Cited by 1,162
Modern microprocessor built from complementary carbon nanotube transistors
Hills, G., Lau, C., Wright, A., Fuller, S., Bishop, M. D., Srimani, T., Kanhaiya, P., Ho, R., Amer, A., Stein, Y., et al. (2019) · Nature · doi:10.1038/s41586-019-1493-8 · Cited by 691
Hybrid 3D Printing of Soft Electronics
Valentine, A. D., Busbee, T. A., Boley, J. W., Raney, J. R., Chortos, A., Kotikian, A., Berrigan, J. D., Durstock, M. F., & Lewis, J. A. (2017) · Advanced Materials · doi:10.1002/adma.201703817 · Cited by 688
Nanomesh pressure sensor for monitoring finger manipulation without sensory interference
Lee, S., Franklin, S., Hassani, F. A., Yokota, T., Nayeem, M. O. G., Wang, Y., Leib, R., Cheng, G., Franklin, D. W., & Someya, T. (2020) · Science · doi:10.1126/science.abc9735 · Cited by 640
Three-dimensional integrated stretchable electronics
Huang, Z., Hao, Y., Li, Y., Hu, H., Wang, C., Nomoto, A., Pan, T., Gu, Y., Chen, Y., Zhang, T., et al. (2018) · Nature Electronics · doi:10.1038/s41928-018-0116-y · Cited by 551
Cited by
Emerging Electrochromic Materials and Devices for Future Displays
Gu, C., Jia, A.-B., Zhang, Y.-M., & Zhang, S. X.-A. (2022) · Chemical Reviews · doi:10.1021/acs.chemrev.1c01055 · Cited by 833
Neuromorphic sensorimotor loop embodied by monolithically integrated, low-voltage, soft e-skin
Wang, W., Jiang, Y., Zhong, D., Zhang, Z., Choudhury, S., Lai, J.-C., Gong, H., Niu, S., Yan, X., Zheng, Y., et al. (2023) · Science · doi:10.1126/science.ade0086 · Cited by 788
Self-citationHigh-speed and large-scale intrinsically stretchable integrated circuits
Zhong, D., Wu, C., Jiang, Y., Yuan, Y., Kim, M.-G., Nishio, Y., Shih, C.-C., Wang, W., Lai, J.-C., Ji, X., et al. (2024) · Nature · doi:10.1038/s41586-024-07096-7 · Cited by 429
Self-citationVertical organic electrochemical transistors for complementary circuits
Huang, W., Chen, J., Yao, Y., Zheng, D., Ji, X., Feng, L.-W., Moore, D., Glavin, N. R., Xie, M., Chen, Y., et al. (2023) · Nature · doi:10.1038/s41586-022-05592-2 · Cited by 423
Flexible brain–computer interfaces
Tang, X., Shen, H., Zhao, S., Li, N., & Liu, J. (2023) · Nature Electronics · doi:10.1038/s41928-022-00913-9 · Cited by 373
Metadata
- Authors
- Zheng, Y.-Q., Liu, Y., Zhong, D., Nikzad, S., Liu, S., Yu, Z., Liu, D., Wu, H.-C., Zhu, C., Li, J., Tran, H., Tok, J. B.-H., & Bao, Z.
- Venue
- Science
- Published
- 2021-07-02
- Volume
- 373
- Issue
- 6550
- Pages
- 88-94
- ISSN
- 0036-8075 (ISSN-L)
- 1095-9203
- OpenAlex
- W3173205213
- Cited by
- 401
- References
- 28
- FWCI
- 17.93
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Monolithic optical microlithography of high-density elastic circuits. https://app.cochat.ai/papers/10.1126/science.abh3551
- The paper
- Zheng, Y.-Q., Liu, Y., Zhong, D., Nikzad, S., Liu, S., Yu, Z., Liu, D., Wu, H.-C., Zhu, C., Li, J., Tran, H., Tok, J. B.-H., & Bao, Z. (2021). Monolithic optical microlithography of high-density elastic circuits. Science. https://doi.org/10.1126/science.abh3551
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
