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SOFT LITHOGRAPHY
Abstract
Abstract Soft lithography represents a non-photolithographic strategy based on self-assembly and replica molding for carrying out micro- and nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography, an elastomeric stamp with patterned relief structures on its surface is used to generate patterns and structures with feature sizes ranging from 30 nm to 100 μm. Five techniques have been demonstrated: microcontact printing (μCP), replica molding (REM), microtransfer molding (μTM), micromolding in capillaries (MIMIC), and solvent-assisted micromolding (SAMIM). In this chapter we discuss the procedures for these techniques and their applications in micro- and nanofabrication, surface chemistry, materials science, optics, MEMS, and microelectronics.
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Cited by
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Ratner, B. D., & Bryant, S. J. (2004) · Annual Review of Biomedical Engineering · doi:10.1146/annurev.bioeng.6.040803.140027 · Cited by 1,507
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Hines, L., Petersen, K., Lum, G. Z., & Sitti, M. (2017) · Advanced Materials · doi:10.1002/adma.201603483 · Cited by 1,337
A guide to the organ-on-a-chip
Leung, C. M., de Haan, P., Ronaldson-Bouchard, K., Kim, G.-A., Ko, J., Rho, H. S., Chen, Z., Habibovic, P., Jeon, N. L., Takayama, S., et al. (2022) · Nature Reviews Methods Primers · doi:10.1038/s43586-022-00118-6 · Cited by 1,116
Advances in organ-on-a-chip engineering
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Metadata
- Authors
- Xia, Y., & Whitesides, G. M.
- Venue
- Annual Review of Materials Science
- Publisher
- Annual Reviews
- Published
- 1998-08
- Volume
- 28
- Issue
- 1
- Pages
- 153-184
- ISSN
- 0084-6600 (ISSN-L)
- OpenAlex
- W4247419735
- Cited by
- 4,611
- References
- 0
- FWCI
- 19.54
- Type
- journal article
- Language
- en
- Open access
- closed
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