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Cited by 46Optical Polarization and EllipsometryOptical measurement and interference techniquesSurface Roughness and Optical Measurements

The DOI matches its Crossref record; 58 of the 58 references it cites were found in a registry or an index.

Image scanning ellipsometry for measuring nonuniform film thickness profiles

Liu, An-Hong, Wayner, Peter C., Plawsky, Joel L.·1994·Applied Optics
DOI 10.1364/ao.33.001223
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Abstract

A novel technique to measure the two-dimensional (2-D) thickness profile of a nonuniform, thin film, from several nanometers to several micrometers, in a steady state as well as in a transient state has been developed and tested. Image scanning ellipsometry (ISE) is a full-field imaging technique that one can use to study every point on the surface simultaneously with high spatial resolution and thickness sensitivity, i.e., it can measure and map the 2-D film thickness profile. The primary purpose of this paper is to present the basic concept of ISE and a demonstration of its use.

Overview

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Registry

Crossref · 10.1364/ao.33.001223

Cites

58 of 58 references verified0 citation errors · 0 not checkable

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Citations

Cites

Flagged first, then by citations

Research works printed but not linked: 4

  1. Derjaguin, 1940, Acta Physicochim. URSS, 12, 181
  2. Klausner, 1992, Rev. Sci. Instrum., 62, 3152
  3. Blinov, 1991, J. Phys. I (Paris), 1, 459
  4. Cohn, 1988, Appl. Opt., 27, 4644

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Metadata

Authors
Liu, A.-H., Wayner, P. C., & Plawsky, J. L.
Affiliations
Rensselaer Polytechnic Institute (US)
ORCID
Plawsky, Joel L.
Venue
Applied Optics
Publisher
Optica Publishing Group
Published
1994-03-01
Volume
33
Issue
7
Pages
1223
ISSN
  • 0003-6935 (ISSN-L)
  • 1539-4522
DOI
10.1364/ao.33.001223
OpenAlex
W2055237590
Cited by
46
References
58
Citations by year
2026: 1 · 2025: 2 · 2024: 1 · 2021: 4 · 2020: 1 · 2019: 3 · 2018: 1 · 2014: 2 · 2013: 2
FWCI
2.77
Type
journal article
Language
en
Open access
closed
Licence
Locations
  • Applied Optics (publishedVersion)
  • PubMed (publishedVersion)
Topics
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Optical Polarization and Ellipsometry
  • Physical Sciences › Computer Science › Computer Vision and Pattern Recognition › Optical measurement and interference techniques
  • Physical Sciences › Physics and Astronomy › Instrumentation › Surface Roughness and Optical Measurements
Keywords
film thickness profile, full-field imaging

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