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Cited by 473

The DOI matches its Crossref record; 9 of the 9 references it cites were found in a registry or an index.

High performance, waveguide integrated Ge photodetectors

Open access
Ahn, Donghwan, Hong, Ching-yin, Liu, Jifeng, Giziewicz, Wojciech, Beals, Mark, Kimerling, Lionel C., Michel, Jurgen, Chen, Jian, Kärtner, Franz X.·2007·Optics Express

Abstract

Photonic systems based on complementary metal oxide semiconductor (CMOS) technology require the integration of passive and active photonic devices. The integration of waveguides and photodetector is one of the most important technologies. We report a Ge p-i-n photodetector that is monolithically integrated with silicon oxynitride and silicon nitride waveguides. All processes and materials are CMOS compatible and can be implemented in the current integrated circuit process technology. The small size of the devices results in low absolute dark current. The waveguidecoupled Ge devices show high efficiency (~90%) over a wide range of wavelengths well beyond the direct band gap of Ge, resulting in a responsivity of 1.08 A/W for 1550 nm light. The device speed of 7.2 GHz at 1V reverse bias is strongly affected by the capacitance of the probe pads. The high-performance of the devices at low voltage ( </= 1V) facilitates the integration with CMOS circuits.

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Metadata

Authors
Ahn, D., Hong, C.-Y., Liu, J., Giziewicz, W., Beals, M., Kimerling, L. C., Michel, J., Chen, J., & Kärtner, F. X.
Venue
Optics Express
Published
2007
Volume
15
Issue
7
Pages
3916
ISSN
1094-4087 (ISSN-L)
OpenAlex
W1994551585
Cited by
473
References
9
FWCI
37.80
Type
journal article
Language
en
Open access
gold
Licence

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CoChat. (2026). Citation check: High performance, waveguide integrated Ge photodetectors. https://app.cochat.ai/papers/10.1364/oe.15.003916
The paper
Ahn, D., Hong, C.-Y., Liu, J., Giziewicz, W., Beals, M., Kimerling, L. C., Michel, J., Chen, J., & Kärtner, F. X. (2007). High performance, waveguide integrated Ge photodetectors. Optics Express. https://doi.org/10.1364/oe.15.003916

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