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Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer
Open accessAbstract
We demonstrate a 32 × 32 path-independent-insertion-loss optical path switch that integrates 1024 thermooptic Mach-Zehnder switches and 961 intersections on a small, 11 × 25 mm2 die. The switch is fabricated on a 300-mm-diameter silicon-on-insulator wafer by a complementary metal-oxide semiconductor-compatible process with advanced ArF immersion lithography. For reliable electrical packaging, the switch chip is flip-chip bonded to a ceramic interposer that arranges the electrodes in a 0.5-mm pitch land grid array. The on-chip loss is measured to be 15.8 ± 1.0 dB, and successful switching is demonstrated for digital-coherent 43-Gb/s QPSK signals. The total crosstalk of the switch is estimated to be less than -20 dB at the center wavelength of 1545 nm. The bandwidth narrowing caused by dimensional errors that arise during fabrication is discussed.
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Cited by
Optimal design for universal multiport interferometers
Clements, W. R., Humphreys, P. C., Metcalf, B. J., Kolthammer, W. S., & Walsmley, I. A. (2016) · Optica · doi:10.1364/optica.3.001460 · Cited by 1,216
Graphene-based integrated photonics for next-generation datacom and telecom
Romagnoli, M., Sorianello, V., Midrio, M., Koppens, F. H. L., Huyghebaert, C., Neumaier, D., Galli, P., Templ, W., D’Errico, A., & Ferrari, A. C. (2018) · Nature Reviews Materials · doi:10.1038/s41578-018-0040-9 · Cited by 409
Li, C., Liu, D., & Dai, D. (2019) · Nanophotonics · doi:10.1515/nanoph-2018-0161 · Cited by 346
16 × 16 non-blocking silicon optical switch based on electro-optic Mach-Zehnder interferometers
Lu, L., Zhao, S., Zhou, L., Li, D., Li, Z., Wang, M., Li, X., & Chen, J. (2016) · Optics Express · doi:10.1364/oe.24.009295 · Cited by 283
Wafer-scale silicon photonic switches beyond die size limit
Seok, T. J., Kwon, K., Henriksson, J., Luo, J., & Wu, M. C. (2019) · Optica · doi:10.1364/optica.6.000490 · Cited by 214
Metadata
- Authors
- Tanizawa, K., Suzuki, K., Toyama, M., Ohtsuka, M., Yokoyama, N., Matsumaro, K., Seki, M., Koshino, K., Sugaya, T., Suda, S., Cong, G., Kimura, T., Ikeda, K., Namiki, S., & Kawashima, H.
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2015-06-26
- Volume
- 23
- Issue
- 13
- Pages
- 17599
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W834513743
- Cited by
- 194
- References
- 0
- FWCI
- 16.36
- Type
- journal article
- Language
- en
- Open access
- gold
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- The paper
- Tanizawa, K., Suzuki, K., Toyama, M., Ohtsuka, M., Yokoyama, N., Matsumaro, K., Seki, M., Koshino, K., Sugaya, T., Suda, S., Cong, G., Kimura, T., Ikeda, K., Namiki, S., & Kawashima, H. (2015). Ultra-compact 32 × 32 strictly-non-blocking Si-wire optical switch with fan-out LGA interposer. Optics Express. https://doi.org/10.1364/oe.23.017599
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